A multisensor employing an ultrasonic Lamb-wave oscillator

Wenzel, S.W.; White, Richard M.

doi:10.1109/16.2525

Cited by 245 publications

(85 citation statements)

References 13 publications

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“…From equations (5) and (6) we can also obtain (4) (5) (6) (7) It is interesting to note that equations (6) and (7) are very similar to the velocity expressions for the Ao mode [8]. The nonzero tension cases have been reported elsewhere [9].…”

Section: Flexural Acoustic (Fi1) Mode Of Thin Rodsmentioning

confidence: 48%

Thin rod flexural acoustic wave devices: a sensor candidate

Jen¹,

Yu²,

Wang³

et al. 1991

NDT & E International

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Section: Flexural Acoustic (Fi1) Mode Of Thin Rodsmentioning

confidence: 48%

Thin rod flexural acoustic wave devices: a sensor candidate

Jen¹,

Yu²,

Wang³

et al. 1991

NDT & E International

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“…The second case is for an thin Zinc Oxide (ZnO) film of thickness of 3.0 ~m that is widely used for biosensors [2] . For this case Ps = 5 .…”

Section: A Thin Platementioning

confidence: 99%

“…Recently, resurgent interest in Lamb waves was initiated in their applications of multisensors [2]. The principle of these Lamb-Wave Sensors is that the propagation velocity of Lamb waves changes when a plate is bordered with a liquid.…”

mentioning

confidence: 99%

The Interfacial Mass Detection with Lamb-Wave Sensors

Zhu

1992

Review of Progress in Quantitative Nondestructive Evaluation

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A sensor which measures physical parameters of a liquid with high sensitivity and accuracy is in great demand in medicine, biology, chemistry and environmental science [1]. Recently, resurgent interest in Lamb waves was initiated in their applications of multisensors [2]. The principle of these Lamb-Wave Sensors is that the propagation velocity of Lamb waves changes when a plate is bordered with a liquid. In this paper, we report the results of our recent theoretical investigations of the effects of bordering liquid layers on the propagation of Lamb waves in asolid plate.

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“…White and Wenzel have shown that flexural plate waves (FPWs) can be excited in a free-standing membrane formed on a silicon substrate 1,2 . Included in the layers of their composite membrane are a piezoelectric ZnO layer and interdigital transducers that are used to excite the FPWs.…”

Section: Introductionmentioning

confidence: 99%

Development of Magnetically Excited Flexural Plate Wave Devices for Implementation as Physical, Chemical, and Acoustic Sensors, and as Integrated Micro-Pumps for Sensored Systems

Schubert¹,

Mitchell²,

Graf³

et al. 2002

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The magnetically excited flexural plate wave (mag-FPW) device has great promise as a versatile sensor platform. FPW's can have better sensitivity at lower operating frequencies than surface acoustic wave (SAW) devices. Lower operating frequency (< 1 MHz for the FPW versus several hundred MHz to a few GHz for the SAW device) simplifies the control electronics and makes integration of sensor with electronics easier. Magnetic rather than piezoelectric excitation of the FPW greatly simplifies the device structure and processing by eliminating the need for piezoelectric thin films, also simplifying integration issues. The versatile mag-FPW resonator structure can potentially be configured to fulfill a number of critical functions in an autonomous sensored system. As a physical sensor, the device can be extremely sensitive to temperature, fluid flow, strain, acceleration and vibration. By coating the membrane with self-assembled monolayers (SAMs), or polymer films with selective absorption properties (originally developed for SAW sensors), the mass sensitivity of the FPW allows it to be used as biological or chemical sensors. Yet another critical need in autonomous sensor systems is the ability to pump fluid. FPW structures can be configured as micro-pumps. This report describes work done to develop mag-FPW devices as physical, chemical, and acoustic sensors, and as micro-pumps for both liquid and gas-phase analytes to enable new integrated sensing platform.4

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A multisensor employing an ultrasonic Lamb-wave oscillator

Cited by 245 publications

References 13 publications

Thin rod flexural acoustic wave devices: a sensor candidate

Thin rod flexural acoustic wave devices: a sensor candidate

The Interfacial Mass Detection with Lamb-Wave Sensors

Development of Magnetically Excited Flexural Plate Wave Devices for Implementation as Physical, Chemical, and Acoustic Sensors, and as Integrated Micro-Pumps for Sensored Systems

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