A Multi-Technique Approach for a Complete Thin Film Characterisation

Abstract

Here we provide an overview of a multi-technique investigation of layered thin film and ultra-thin film coatings. Surface sensitive analytical techniques are chosen for their different sampling depths and include a combination of conventional Al K and higher photon energy Ag L excited XPS, angle resolved X-ray photoelectron spectroscopy (ARXPS) with maximum entropy method (MEM) reconstruction of concentration depth profiles and argon cluster depth profiling.