A Moving-Slider MEMS Actuator for High-Bandwidth HDD Tracking

Hirano, T.; White, Matthew; Yang, Henry T. Y.; Scott, Kenneth E.; Pattanaik, S.; Arya, S.; Huang, Fu-Ying

doi:10.1109/tmag.2004.829840

Cited by 24 publications

(12 citation statements)

References 5 publications

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“…In the dualstage actuation servo systems, the VCM actuator is used as the primary stage to provide long track seeking, but with poor accuracy and slow response time, while the secondary stage actuator is used to provide higher precision and faster response, but with a stroke limit. To date, there are mainly two types of secondary actuators for high servo bandwidth: 1) actuated suspension type [3] and 2) slider-driven type [4], [5]. For the slider-driven type, the microactuator is attached to the slider and moves the slider relatively to the suspension.…”

Section: Introductionmentioning

confidence: 99%

Three-Stage Control for High Servo Bandwidth and Small Skew Actuation

Tan

Yang

2015

IEEE Trans. Magn.

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A three-stage actuation control system is proposed to enable high servo bandwidth track-following and possibly for small skew angle actuation system of hard disk drives. It involves a voice coil motor actuator as a primary actuator and a PZT actuated milliactuator as a secondary actuator. Both of them have the first dominant resonance mode at 5 kHz and the milliactuator has 200 nm stroke. A thermal microactuator having 50 nm stroke is used as a third actuator for a high servo bandwidth. A control strategy with controller design method is proposed to meet the performance requirement of each actuator's control loop and the overall control system. More than 6 kHz servo bandwidth is achieved and 430 nm external vibration can be covered by the three-stage actuation system. Simulation and experimental results demonstrate the control performance of the three-stage closed-loop system.Index Terms-Dual-stage servo system, hard disk drives (HDDs), microactuator, milliactuator, skew angle, three-stage actuation system.

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Section: Introductionmentioning

confidence: 99%

Three-Stage Control for High Servo Bandwidth and Small Skew Actuation

Tan

Yang

2015

IEEE Trans. Magn.

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“…Electrostatic micro-actuator for HDD tracking servo has been shown which is controller by electrostatic force [2]. A Moving-Slider MEMS Actuator for High-Bandwidth HDD Tracking with servo bandwidth of 8 kHz was demonstrated with an 80-kHz sampling rate has been discussed in [10]. Thus we can see that MEMS technologies will benefit HDD actuator technology in an immense way.…”

Section: A Actuators and Headsmentioning

confidence: 99%

“…Note that the driving force F is proportional to the aspect ratio of the inter-electrode gap h/g [10]. The modeling is shown in Fig.…”

Section: A Actuators and Headsmentioning

confidence: 99%

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

Pathak¹,

Ahmed²,

Joshi

2009

2009 Innovative Technologies in Intelligent Systems and Industrial Applications

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Abstract-We have demonstrated the impact of developments in nanotechnology to Hard Disk Drive (HDD) technology. We have put forth a proposition to enhance the modeling of future storage devices based on innovations in the field of Nanotechnology and MEMS. We have elucidated the influence of recent advances of Nano-Composites, MEMS (Micro Electro Mechanical Systems) etc. and their implications towards the development of storage devices in the future. We have discussed about reliability modeling, nano-physics modeling and thin-film polymer modeling of HDD technology on computer-aided engineering tools such as MATLAB. We have also devised a design of Nanotechnology and MEMS enabled future HDD. We have given a small model for array based MEMS cantilevers for HDD and have used SUGAR MEMS simulation library in MATLAB to model it. We have included the parameters to be kept in mind while modeling a HDD in light of the innovations in Nanotechnology and MEMS. Finally we have stated the working of a MEMS-based actuator and presented its reliability modeling.

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“…We used high-aspect ratio (20:1), thick metal (up to 40 micron) fabrication technique developed in our lab [4]. Figure 9 shows frequency response of this microactuator (input: drive voltage, output: motion of the read/write element).…”

Section: Gimbal-integrated Trackingmentioning

confidence: 99%

“…This requires tighter control of recording head positioning over data bits on a disk, in both horizontal (off-track) and vertical (disk/head spacing) directions. A lot of MEMS devices have been investigated, developed, and some have been already used in HDDs, such as tracking control actuator [1][2][3][4] and fly-height control actuator [5,6]. In this paper, we present two new MEMS device examples: "gimbal chip" and "gimbal-integrated tracking microactuator".…”

Section: Introductionmentioning

confidence: 99%