A Monolithic Phased Array Using 3-bit Distributed RF MEMS Phase Shifters

Topallı, Kağan; Çivi, Özlem Aydın; Demır, Şımşek; Koc, Sencer; Akın, Tayfun

doi:10.1109/tmtt.2007.914377

Cited by 71 publications

(27 citation statements)

References 20 publications

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“…In RF/microwave domain also, MEMS is coming up with its promising characteristics. Bulky devices or circuit elements of now-a-days are on the verge of replacement with MEMS devices because of its tiny size, light weight, low insertion loss, negligible power loss and above all linear characteristics [1][2][3]. In addition to above features, worldwide this booming technology is growing exponentially in modern communication field as it offers an easy means to design reconfigurable devices for realizing multiband system.…”

Section: Introductionmentioning

confidence: 99%

MEMS based monolithic Phased array using 3-bit Switched-line Phase Shifter

Karmakr

Roy

Bhattacharjee

2017

AEM

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This article details the design of an electronically scanning phased array antenna with proposed fabrication process steps. Structure is based upon RF micro-electromechanical system (MEMS) technology. Capacitive type shunt switches have been implemented here to cater high frequency operation. The architecture, which is deigned at 30 GHz, consists of 3-bit (11.25º, 22.5º & 45º) integrated Switched-line phase shifter and a linearly polarized microstrip patch antenna. Detailed design tricks of the K aband phase shifter is outlined here. The whole design is targeted for future monolithic integration. So, the substrate of choice is High Resistive Silicon (ρ > 8kΩ-cm, tan δ =0.01 and ϵ r =11.8). The overall circuit occupies an crosssectional area of 20 × 5 mm 2 . The simulated results show that the phase shifter can provide nearly 11.25º/22.5º/45º phase shifts and their combinations at the expense of 1dB average insertion loss at 30 GHz for eight combinations. Practical fabrication process flow using surface micromachining is proposed here. Critical dimensions of the phased array structure is governed by the deign rules of the standard CMOS/MEMS foundry.

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Section: Introductionmentioning

confidence: 99%

MEMS based monolithic Phased array using 3-bit Switched-line Phase Shifter

Karmakr

Roy

Bhattacharjee

2017

AEM

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“…The tunability property is also known as reconfigurability characteristic. Reconfigurable devices such as antennas [1][2][3][4][5][6][7][8][9][10][11][12][13][14], filters [15][16][17][18][19], impedance tuners [20][21][22][23], phase shifters [24,25] and amplifiers [26][27][28][29] have been used in recent years, considerably. The pattern, polarization, bandwidth and resonant frequency are fixed radiation parameters of the conventionally used antennas.…”

Section: Introductionmentioning

confidence: 99%

A Novel Multi-State Integrated Rf Mems Switch for Reconfigurable Antennas Applications

Pourziad¹,

Nikmehr²,

Veladi³

2013

PIER

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Abstract-A novel multi-state RF MEMS switch for microstrip antenna applications is presented. The proposed switch exhibits seven different states of operation, has a very simple DC biasing mechanism, and can be integrated with antenna structure. Based on these properties, this switch may find its usage in multifunction reconfigurable antennas. To exhibit this application, it is employed in the reconfiguration mechanism of a U-slotted antenna. In different states of the switch, the antenna resonates at different frequencies. All the standard frequency bands of the wireless communication services with some additional frequency bands is covered with this reconfigurable U-slotted antenna. Moreover, the proposed antenna structure is a cost-effective solution since it comprises a commonly used FR4 substrate. The switch is integrated with antenna structure on the same substrate. A prototype of the designed antenna was fabricated and tested for performance verification of the proposed switch and antenna.

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“…In recent years, radio frequency micro-electromechanical systems (RF MEMS) technology has offered new possibilities for passive phase shifters on various substrate materials to overcome these disadvantages [10,11]. If these could be integrated with the remaining components of the phase control module of phased arrays, better performing antenna systems at lower cost may result.…”

Section: Introductionmentioning

confidence: 99%

“…If these could be integrated with the remaining components of the phase control module of phased arrays, better performing antenna systems at lower cost may result. Small monolithic phased array antenna system for operating frequency 15 GHz is reported by Topalli et al [11] on a glass substrate using distributed MEMS transmission line (DMTL) phase shifters with an overall size of 2.9λ × 2.4λ. Similarly, Ji et al [12] reported phase shifters on silicon wafer using barium strontium titanate (BST) phase shifters for 15GHz which does not have any moving components.…”

Section: Introductionmentioning

confidence: 99%

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A Low-Cost Phased Array Antenna Integrated With Phase Shifters Cofabricated on the Laminate

Goel¹,

Vinoy²

2011

PIER B

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Abstract-This paper presents the design, development and experimental characterization of a monolithic phased array antenna integrated on a microwave laminate.A four-element linear antenna array is realized by cofabricating the corporate feed network, microstrip-CPW transitions, DC blocks, and mesoscale phase shifters on the same substrate. The phase shifters used here are electrostatically actuated and their operation is similar to that of the distributed MEMS transmission line phase shifters. Various components of the array are designed and are individually evaluated before fabricating together. The measured radiation pattern characteristics for this array shows a scan angle of 10 • in the Xband. All fabrication processes employed here can be performed at a good printed circuit manufacturing facility. This simple approach of cofabricating various components can be readily extended for large phased arrays required in radar and space communication applications.

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A Monolithic Phased Array Using 3-bit Distributed RF MEMS Phase Shifters

Cited by 71 publications

References 20 publications

MEMS based monolithic Phased array using 3-bit Switched-line Phase Shifter

MEMS based monolithic Phased array using 3-bit Switched-line Phase Shifter

A Novel Multi-State Integrated Rf Mems Switch for Reconfigurable Antennas Applications

A Low-Cost Phased Array Antenna Integrated With Phase Shifters Cofabricated on the Laminate

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