A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications

Wang, Dingkang; Koppal, Sanjeev J.; Xie, Huikai

doi:10.1109/jmems.2020.3001921

Cited by 15 publications

(8 citation statements)

References 15 publications

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“…69,70 Besides, researchers have carried out a lot of studies aiming at the laser radar and the light detection and ranging (LiDAR). [71][72][73][74][75] In the future, the laser measurement technique will have two main directions of development: one is the field which needs larger measurement range such as the long-distance measurement and gravitational wave vibration measurement; the other is the micro-scale measurement, which has higher requirement of precision and resolution, such as the microvibration measurement of nano-meter structures. For future development, more and more novel techniques will be applied to improve the performance of the laser measurement and the combination of the vision measurement will open a new chapter in the story of measurement techniques.…”

Section: Discussionmentioning

confidence: 99%

“…Recently, the laser measurement has been used more and more widely in frontier fields, such as 3D measurement, astronomical surveying and robotics control 69,70 . Besides, researchers have carried out a lot of studies aiming at the laser radar and the light detection and ranging (LiDAR) 71–75 . In the future, the laser measurement technique will have two main directions of development: one is the field which needs larger measurement range such as the long‐distance measurement and gravitational wave vibration measurement; the other is the micro‐scale measurement, which has higher requirement of precision and resolution, such as the micro‐vibration measurement of nano‐meter structures.…”

Section: Discussionmentioning

confidence: 99%

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Improved laser measurement using advanced techniques: A review

Liu

Wang

et al. 2021

Micro & Optical Tech Letters

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Laser measurement technique has been widely explored and applied in various fields in recent years due to its advantages of high measurement precision and resolution. However, applications in frontier fields such as MEMS motion measurement and robotics control pose have requirement for higher precision and resolution, which promote further studies in improving the performance of this technique. Many advanced techniques have been proposed and applied in the laser measurement system to optimize its performance, and the optimized measurement system has found its way in state-of-the-art applications. In this invited paper, we focus on the latest investigations and new applications of the improved laser measurement methods, especially present recent research works regarding the laser triangulation measurement and the laser heterodyne vibration measurement. At the end, we have discussed further developments and challenges of laser measurement technique.

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Section: Discussionmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Improved laser measurement using advanced techniques: A review

Liu

Wang

et al. 2021

Micro & Optical Tech Letters

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“…In addition to the three applications discussed above, Sibased MOEMS devices have many applications in fields such as MOEMS actuators [77] and accelerometers [78] , variable optical attenuators [79] , spectral sensor heads [80] , blazed gratings [81] , mass spectrometers [82] , and scanners [83,84] . For example, Sandner et al proposed a translatory MOEMS actuator with an excellent large stroke driven by electrostatic resonance; it was especially developed for fast optical path length modulation in miniaturized FTIR spectrometers [77] .…”

Section: Optical/photonic Switchesmentioning

confidence: 99%

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Chen¹,

Zhang²,

Hong³

et al. 2022

J. Semicond.

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Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.

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“…The phase accumulator allows for a very flexible parametric frequency sweep and highresolution frequency output. The expression 1 2 N ÃCLK describes the phase accumulator resolution dependency on the number of bits in the accumulator (N) and on the frequency of the FPGA system clock (CLK). With 46 bits used for a phase accumulator, the resolution is 1.78 μHz independent of the frequency selection.…”

Section: Electronicsmentioning

confidence: 99%

“…Microelectromechanical system (MEMS)based scanning elements aim to solve the need for miniaturization and cost reduction of LiDAR systems while maintaining high performance in key parameters such as range, angular resolution, and scan rate. Various methods have been applied to miniaturize the optical scanning elements of the LiDAR system, such as the two-mirror systems presented by Wang et al 1 and Nguyen et al 2 or the wobbling mirror for circular scanning presented by Pensala et al 3 and Hoffman et al 4 This work is concentrated on a single-mirror approach for a 2D-scanning pattern suitable for use in forward-looking LiDARs. Different types of 2D-scanning LiDARs have been reported based on PZT-elements 5 and electrothermal, 6,7 electromagnetic, 8 or electrostatic actuators.…”

Section: Introductionmentioning

confidence: 99%

Resonating AlN-thin film MEMS mirror with digital control

Ruotsalainen

Morits

Ylivaara

et al. 2022

J. Optical Microsystems

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Piezoelectrically actuated resonant micromirrors were designed to meet the light detection and ranging (LiDAR) system requirements. Key features were a 3-mm mirror aperture, a 40-deg field of view, and a 50-Hz refresh rate. The presented micromirror provides biaxial symmetrical beam steering with AE12.7 deg mechanical tilt angle, resulting in a 50-deg field of view with an adjustable Lissajous XY-scanning pattern for a forward-looking LiDAR system. The mirrors were fabricated using silicon on insulator wafers, and actuation was based on piezoelectric aluminium nitride thin film. The mirrors were vacuum packaged for high-quality factor resonator operation. The device design contained eight separate piezoelectric aluminium nitride elements arranged as differential pairs for each axis, where each actuator was equipped with a sensing element providing a mechanically coupled electrical feedback signal. The piezoelectric elements connected as actuators required only minimal power and were directly compatible with CMOS low-voltage logic, which eases integration to driving digital systems. The sense elements are used to monitor phase, amplitude, and frequency. A digital control system connected to each of these elements provides accurate frequency and phase control of independent orthogonal resonators, permitting control of the X and Y amplitudes and the refresh rate of the Lissajous pattern.

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A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications

Cited by 15 publications

References 15 publications

Improved laser measurement using advanced techniques: A review

Improved laser measurement using advanced techniques: A review

Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Resonating AlN-thin film MEMS mirror with digital control

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