“…The full range of physical implementations have been reported, including discrete piezoelectric devices[4,7,14,24,25,27,29-3 1,33,35,38,40-42,46,49,53], hybrid devices using thin film piezoelectrics deposited on semiconducting substrates[ 1,3,5,6,13,22,23,26,39,48,5 l], and monolithic implementations using piezoelectric semiconductors[20,28,32,36,37,44,50].…”