A modulated ellipsometer for studying thin film optical properties and surface dynamics

Jasperson, S. N.; Burge, D. K.; O’Handley, R. C.

doi:10.1016/0039-6028(73)90345-2

Cited by 77 publications

(17 citation statements)

References 10 publications

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“…One of the first experimental demonstrations was written about in [3] and several efficient commercial systems are available today [4]. One other optical method for the deposition control is in situ ellipsometry [5]. It relies on changes in the state of polarization that depends on the optical nature of the deposited film.…”

Section: Introductionmentioning

confidence: 99%

Interest of broadband optical monitoring for thin-film filter manufacturing

et al. 2007

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Broadband optical monitoring for thin-film filter manufacturing is more and more developed thanks to better performances of spectrometers with array detectors. We compare this optical monitoring with turning point monitoring and quartz monitoring of different designs. The sensitivity to thickness errors and to refractive index errors is evaluated. We show that real time determination of deposited thickness is a valuable criterion. We also present our experimental setup of transmittance and reflectance broadband optical monitoring. The use of a 400-1000 nm range combined with a signal-to-noise ratio of ϳ2500 in transmittance and 1000 in reflectance permits us to expect the manufacturing of high-performance non-quarter-wave designs. A first manufacturing of an 18-layer non-quarter-wave high-pass filter is provided.

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Section: Introductionmentioning

confidence: 99%

Interest of broadband optical monitoring for thin-film filter manufacturing

et al. 2007

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“…However, experiments suffered from tedious manual operation and a limited number of wavelengths available for null ellipsometry. This situation changed when automatic ellipsometers were developed around 1970 and the modern era began . Their mode of operation was based on rotating elements (primarily polarizer or analyzer) or modulation of the phase of a compensator (PEM).…”

Section: Middle Periodmentioning

confidence: 99%

A Brief History of Ellipsometry

Rossów

2018

Physica Status Solidi (b)

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In this paper the history of ellipsometry is described with emphasis on the 19th century. The understanding of polarized light and its interaction with matter is tightly connected to the development of the electromagnetic theory and thus optics. While some effects of polarized light were already known to the Vikings, a reasonable starting is the work of E. Malus, who first defined light polarization. First instruments were likely built in the first half of the 19th century. However, ellipsometry became an optical characterization technique only after the optical response was formulated within the Maxwell equations at the beginning of the 20th century.

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“…The optical geometry of a transmission spectroscopic ellipsometry (TSE) setup equipped with a photoelastic modulator (PEM; JASCO Co., M-150) [14,15] is shown in Fig. 1.…”

Section: A Renormalized Transmission Spectroscopic Ellipsometrymentioning

confidence: 99%

Evaluation technique of cell thickness, pretilt angle, and twist angle for guest–host liquid crystal displays

et al. 2013

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In this study, we demonstrated the evaluation of the device parameters, such as the cell thickness d, pretilt angles at the top and bottom substrates θ0 and θd, and twist angle φt for the guest-host (GH)-type electrically controlled birefringence (ECB) and twisted nematic (TN) modes, using the renormalized transmission ellipsometry (RTE). In the proposed technique, the extended Cauchy equation and the extinction coefficients for the ordinary and extraordinary rays based on the three Gaussian functions were employed as a description of the dielectric function. As a result, the numerically calculated phase difference Δ and angle of amplitude ratio Ψ determined using the proposed technique provided good agreement with the measured Δ and Ψ by introducing the extinction coefficient to the RTE. Furthermore, the device parameters for the GH-ECB and the GH-TN cells were obtained. It was confirmed that the extinction coefficient should be taken into consideration in an analysis of GH liquid crystal displays.

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A modulated ellipsometer for studying thin film optical properties and surface dynamics

Cited by 77 publications

References 10 publications

Interest of broadband optical monitoring for thin-film filter manufacturing

Interest of broadband optical monitoring for thin-film filter manufacturing

A Brief History of Ellipsometry

Evaluation technique of cell thickness, pretilt angle, and twist angle for guest–host liquid crystal displays

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