A Model for Extreme Ultraviolet Radiation Conversion Efficiency From Laser Produced Mass-Limited Tin-Based Droplet Target Plasmas

Abstract

Simple arguments are used to construct a model to explain the extreme ultraviolet radiation conversion efficiency (EUV-CE) of a tin-based droplet target laser produced plasmas by calculating the laser absorption efficiency, radiation efficiency, and spectral efficiency. The dependence of drive laser pulse duration and laser intensity on EUV-CE is investigated. The results show that at some appropriate laser intensity, where the sum energy of the thermal conduction, out-off band radiation and plasma plume kinetic losses is at a minimum, the EUV-CE should reach a maximum. The EUV-CE predicted by the present simple model is also compared with the available experimental and simulation data and a fair agreement between them is found.