A mixed X‐ray source for XPS and X‐AES

Abstract

The concept of the Auger Parameter (AP) is becoming increasingly important in XPS–X‐AES (x‐ray photoelectron spectroscopy and x‐ray‐excited Auger electron spectroscopy). The advantages and disadvantages of present usable monochromatic and unmonochromatic x‐ray sources for determination of the AP are considered. A novel anode face pattern for the generation of mixed x‐ray radiations to obtain the optimum photo‐ and Auger electron lines simultaneously without suffering from the charging effects caused by different x‐ray sources is suggested.