A microsensor array for biochemical sensing

Abstract

A microsensor array to measure chemical properties of biological liquids is presented. A hybrid integration technique is used to mount four sensor chips on a micro flow channel: a pressure, temperature, pH, combined pO 2 and pCO 2 sensor chip. This results in a microsensor array which is developed to meet the technical requirements for space applications. The integration method allows to integrate other types of sensor chips. This multipurpose and multiuser approach makes the microsensor array suitable for various biochemical applications.

Real-time bioprocess monitoring

“…Voigt et al [8] described a field effect transistor with amorphous diamond like carbon as pH sensing layer. Adaptation of ISFET for sensing other chemical species like O 2 and CO 2 can be done it two manners: (a) two step transduction, in which the transducer reacts with the analyte to produce a change in pH that can be measured by a ISFET, for example Clark type electrode that reduces O 2 to OH − ions that are measured by ISFET [9]; and (b) coating the ISFET with a semipermeable membrane through which the analyte passes and causes a pH change measured by ISFET (Severinghaus-type CO 2 sensor in [10]). The intrinsic drawback of the Clark electrode oxygen ISFET is that it consumes dissolved oxygen, which might represent a problem for low volume bioreactors.…”

Implantable Electrochemical Sensors for Biomedical and Clinical Applications: Progress, Problems, and Future Possibilities.

“…The sensor is very attractive for continuous, implantable monitoring applications [130][131] due to its advantages including small size, low-power consumption, robustness, compatibility with on-chip circuit integration for signal processing [132,133], and the significantly low cost associated with batch fabrication using IC technology, as well as mass production of biomembranes [130]. Evolution of the sensor integration can be realized by IC fabrication techniques, in which several different structures [134][135], encapsulation techniques [136][137][138], sensing materials for multi-ions such as H + , Na + , K + and Ca 2+ [139] and pH-ISFETs integrated with standard CMOS processes [140] have been investigated. Advanced micro-and nanofabrication technology and microelectronics, make miniaturization of ISFETs very feasible.…”

Advances in the Microfabrication of Electrochemical Sensors and Systems

“…A detector cell which was comprised of four ISFETs and a¯ow-cell and two separate micromachined pumps were connected [165]. In some¯ow-type sensing systems, only the sensing module was microfabricated, and ordinary macroscopic pumps, valves, and external readout electronics were used to complete the whole system [166]. In a system piezo-electric modular micropumps were incorporated in a stacked structure [156,157,165].…”