3rd Electronics System Integration Technology Conference ESTC 2010
DOI: 10.1109/estc.2010.5642853
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A microscope system for characterization of mechanical properties of small-scaled objects

Abstract: A new microscopy system for characterization of mechanical properties of small-scaled objects is reported. A force sensor, piezo stage, manual manipulators, etc. are integrated in a single platform and these are combined with a high-resolution digital microscope to acquire the load-displacement relationships of the small-scaled objects together with the corresponding deformation pattern of the objects during testing. A small-span bending test of ultrathin Pt wire is demonstrated and the results are discussed.

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