A micromotor using electro-conjugate fluid—Improvement of motor performance by using saw-toothed electrode series

Takemura, Kenjiro; Kozuki, Hiroto; Edamura, Kazuya; Yokota, Shinichi

doi:10.1016/j.sna.2007.05.034

Cited by 23 publications

(7 citation statements)

References 9 publications

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“…The larger sizes on Figure 1a are representative of MEMS motors with volumes ≈ 1 mm 3 . The data points come from numerous different technological approaches, including electrostatic, [2][3][4][5][6][7][8] magnetostatic, [9,10] electromagnetic, [11] electrohydrodynamic, [12] piezoelectric, [13][14][15][16][17][18][19][20][21][22] pneumatic, [23][24][25][26][27] and plasmonic [28,29] technology bases. These motors can advantageously be controlled with conventional electronic systems; however the power density of existing MEMS approaches clearly doesn't scale well to sizes significantly smaller than a cubic millimeter.…”

Section: Background / Literature Reviewmentioning

confidence: 99%

Multiferroic Micro-Motors with Deterministic Single Input Control

Domann,

Chen,

Sepulveda

et al. 2018

Preprint

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This paper describes a method for achieving continuous deterministic 360 • magnetic moment rotations in single domain magnetoelastic discs, and examines the performance bounds for a mechanically lossless multiferroic bead-on-a-disc motor based on dipole coupling these discs to small magnetic nanobeads. The continuous magnetic rotations are attained by controlling the relative orientation of a four-fold anisotropy (e.g., cubic magnetocrystalline anisotropy) with respect to the two-fold magnetoelastic anisotropy. This approach produces continuous rotations from the quasi-static regime up through operational frequencies of several GHz. Driving strains of only ≈90 to 180 ppm are required for operation of motors using existing materials. The large operational frequencies and small sizes, with lateral dimensions of ≈100s of nanometers, produce large power densities for the rotary bead-on-a-disc motor, and a newly proposed linear variant, in a size range where power dense alternative technologies do not currently exist.

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Section: Background / Literature Reviewmentioning

confidence: 99%

Multiferroic Micro-Motors with Deterministic Single Input Control

Domann,

Chen,

Sepulveda

et al. 2018

Preprint

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“…[26] The electromechanical efficiency of the ECF micropump is not as high as that of other actuation, but the advantage of having no mechanical moving parts is attractive. [27] Since its components such as the TPSEs and the microchannels are fabricated by photolithography in micro-electro-mechanical systems (MEMS), this micropump is superior in integrability with other microfluidic device elements. [28][29][30] Notably, the MEMS-fabricated ECF micropump is known for high output power with its small size.…”

Section: Introductionmentioning

confidence: 99%

A Microfabricated Pistonless Syringe Pump Driven by Electro‐Conjugate Fluid with Leakless On/Off Microvalves

Matsubara

Choi

Kim

et al. 2022

Small

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The positive-displacement micropumps push out fluid into one direction by expanding and decreasing a cavity volume with various actuation mechanisms. However, the volume change of the cavity is repeated periodically to supply the fluid, which causes a periodic flow rate change, resulting in a pulse flow. Such pulsations are not suitable for use in specific applications that require stable fluid delivery, such as microsensors [12][13][14] and droplet microfluidic devices. [15,16] For example, in the application of mechanosensors that utilize bending displacements to measure the adsorption of biomolecules on cantilever surface, pulse flow can vibrate the cantilever, generating noise in the output signal. [17,18] In contrast to the positive-displacement micropumps, nonmechanical micropumps that generate pulseless flow have also been developed by using thermo-pneumatic actuation, [19,20] chemical reactions, [21] and capillary force. [22][23][24] However, there are limitations in the thermo-pneumatic actuation due to heat damage to biomaterials, while micropumps using chemical reactions or capillary force have difficulties to actively control the flow rate.As an alternative approach to supply fluids, commercially available syringe pumps are widely used in microfluidic devices. Bulky syringe pumps have disadvantages for use with microfluidic devices due to 1) the large dead volume associated with the large bore of the syringe and its connecting tubes, and 2) difficulty in inserting the whole system into an incubator. Although miniaturizing the conventional bulky syringe is in a growing demand for microfluidic devices, it is challenging due to the difficulty in fabricating and assembling complex 3D microcomponents as well as the scaling law of the mechanical sliding parts in microscale. Since the stick-slip phenomenon occurs in the micro-sized piston-cylinder, it is crucial to avoid any mechanical sliding parts to realize on-chip microsyringe pumps. Also, it is necessary to develop on-chip power sources having not only high output power density but also no mechanical sliding parts.Considering these demands, we focus on utilizing an electroconjugate fluid (ECF) for the development of on-chip microsyringe pumps. The ECF, a functional fluid, can generate an active flow (ECF jet) between a pair of electrodes when a high DC voltage is applied to the electrodes in the ECF. The ECFs are

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“…However, there is no micromotor implementable into a limited space such as the inside of endoscopes. Many miniature motors have been proposed using several driving principles [6], such as an electromagnetic motor [7], [8], an electrostatic motor [9], [10], and an electro-conjugate fluidic motor [11], but their sizes are large or their output torques are small for endoscopes. Ultrasonic motors [12] are expected as a micromotor because of their simple structure and high torque density [13]- [16].…”

Section: Introductionmentioning

confidence: 99%

High-Speed Visual Feedback Control of Miniature Rotating Mirror System Using a Micro Ultrasonic Motor

et al. 2020

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We propose a miniature rotating mirror system using a micro-ultrasonic motor that employs a 45 • angle mirror as its rotor for enlarging the angle of view of cameras. The motor assy, measuring 2 mm in diameter and 4 mm in length, is one of the smallest motors and is expected for medical applications such as endoscopes. In this paper, we build a micromirror assembly, install it into a visual feedback system with an optical system, and demonstrate a motor control with a quick and wide angle-of-view observation. The high-speed camera vision embedded in the system measures the quick motion of the motor in real-time and enables accurate positioning of the mirror angle by p-control using burst waves. The proposed system demonstrates the visual feedback control of the miniature rotating mirror to the angle information obtained by the high-speed camera. The feasibility of the mirror system driven by the micro-ultrasonic motor is shown via demonstration.

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A micromotor using electro-conjugate fluid—Improvement of motor performance by using saw-toothed electrode series

Cited by 23 publications

References 9 publications

Multiferroic Micro-Motors with Deterministic Single Input Control

Multiferroic Micro-Motors with Deterministic Single Input Control

A Microfabricated Pistonless Syringe Pump Driven by Electro‐Conjugate Fluid with Leakless On/Off Microvalves

High-Speed Visual Feedback Control of Miniature Rotating Mirror System Using a Micro Ultrasonic Motor

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