A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance

Potekin, Randi; Kim, Seok; McFarland, D. Michael; Bergman, Lawrence A.; Cho, Han Na; Vakakis, Alexander F.

doi:10.1007/s11071-018-4055-y

Cited by 30 publications

(10 citation statements)

References 44 publications

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“…The detailed MATLAB block diagram for this numerical simulation is provided in Figure S4 of the Supporting Information. [25] For a doubly clamped beam, the most commonly encountered nonlinear behavior is a spring hardening originated from the involvement of tension induced during the oscillatory transverse motion of the beam. When k 3 = 0, the frequency response curve reduces to a simple harmonic curve which has a symmetric shape.…”

Section: Resultsmentioning

confidence: 99%

“…Depending on the contribution of the different sources of nonlinearity (e.g., geometric, material, inertial) in the system, either a softening or stiffening behavior could be observed in the frequency response. [25] For a doubly clamped beam, the most commonly encountered nonlinear behavior is a spring hardening originated from the involvement of tension induced during the oscillatory transverse motion of the beam. [26] In this work, a hardening spring (k 3 > 0) is suggested by the experimental force-displacement curve in Figure 4a, therefore a forward bending frequency response is expected.…”

Section: Resultsmentioning

confidence: 99%

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Broadband, Tunable, Miniaturized Vibration Energy Harvester Using Nonlinear Elastomer Beams and Stretchable Interconnects

Yang

Ismail

Son

et al. 2019

Adv Materials Technologies

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deal of research has gone into the development of vibration energy harvesters (also known as vibration power generators) over the past decade. Based on the structural architecture, vibration energy harvesters can be categorized as either resonant generators (or inertial force generator) or direct force generators. [4] Instead of harnessing the deformation of a material (e.g., pressing, flexing, or stretching motion) induced by direct forces, a resonant generator typically consists of a rigid casing with a seismic mass suspended inside. [4] To date, most of ambient vibration energy harvesters adopt the resonator design, because it only requires one point of attachment to the vibration source which makes the mounting more convenient. [4] The mass moves relative to the casing in response to external vibration and simultaneously, converts kinetic energy into electricity through electrostatic, electromagnetic, piezoelectric, or triboelectric transduction mechanisms. [5][6][7][8] Despite the considerable research effort on vibration energy harvesters, several challenges still exist, which limit the widespread usage of resonant vibration energy harvesters. For a practically useful resonant generator in the context of wireless sensor nodes, at least four criteria need to be satisfied. (1) The device needs to be highly miniaturized (e.g., footprint <1 cm 2 ) to fit in a typical wireless sensor node. [3] This goal can be achieved by the adoption of microelectromechanical systems (MEMS) technology. [1] (2) A low operating frequency which matches the frequency range of the target vibration sources is needed to obtain maximum efficiency. [9] However, typical resonant generators (such as MEMS energy harvesters) are based on springs made of rigid materials which intrinsically tend to exhibit high resonant frequencies. [10] (3) Broadband response and (4) resonance tunability which can significantly improve the efficiency as most real-world vibrations have widely distributed frequency spectra or time variant frequency peak. [11][12][13] However, typical resonant generators are based on linear resonators which have narrow bandwidth and a single resonant frequency. [11,[14][15][16] Here, we demonstrate a design construct and materials for a soft-rigid hybrid device enabling broadband, resonance tunable vibration energy harvesting and self-powered motion sensing. The key concept of the reported design, which is inspired in part by recent works on soft electronics and soft A miniaturized vibration energy harvester, a small yet sustainable power source that converts ambient mechanical vibration into electricity, is considered as a key technology to advance wireless sensor networks for the internet of things. Conventional chip-scale vibration energy harvesters, such as microelectromechanical systems devices that are mostly based on rigid materials (e.g., silicon), inherently exhibit high resonant frequency, narrow bandwidth, and a single peak frequency. Therefore, they are often unsuitable for many real-life applications, as most ambie...

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Broadband, Tunable, Miniaturized Vibration Energy Harvester Using Nonlinear Elastomer Beams and Stretchable Interconnects

Yang

Ismail

Son

et al. 2019

Adv Materials Technologies

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“…Recently, mass detection of very small chemical and biological species using microelectromechanical systems (MEMS) has attracted wide attention [ 1 , 2 , 3 , 4 , 5 , 6 ]. A MEMS mass sensor mainly uses the mechanical characteristics changes before and after the adsorption mass of a resonant element to detect and identify the target analyte [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Liu

Shao

et al. 2021

Micromachines

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Frequency stabilization can overcome the dependence of resonance frequency on amplitude in nonlinear microelectromechanical systems, which is potentially useful in nonlinear mass sensor. In this paper, the physical conditions for frequency stabilization are presented theoretically, and the influence of system parameters on frequency stabilization is analyzed. Firstly, a nonlinear mechanically coupled resonant structure is designed with a nonlinear force composed of a pair of bias voltages and an alternating current (AC) harmonic load. We study coupled-mode vibration and derive the expression of resonance frequency in the nonlinear regime by utilizing perturbation and bifurcation analysis. It is found that improving the quality factor of the system is crucial to realize the frequency stabilization. Typically, stochastic dynamic equation is introduced to prove that the coupled resonant structure can overcome the influence of voltage fluctuation on resonance frequency and improve the robustness of the sensor. In addition, a novel parameter identification method is proposed by using frequency stabilization and bifurcation jumping, which effectively avoids resonance frequency shifts caused by driving voltage. Finally, numerical studies are introduced to verify the mass detection method. The results in this paper can be used to guide the design of a nonlinear sensor.

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“…In fact, it has been widely considered as new structures to use as chemical and biomechanical applications, [1][2][3] in diagnosis of gas atoms 4 and nanoelectromechanical resonators. 5,6 Moreover, carbon nanostructures are considered as fundamental structures of biosensors, micro/nano electromechanical systems (MEMS/NEMS), 7,8 optical transparency 9,10 and memory devices. 11 Just recently, several investigations and studies have been done in the¯eld of nanoplates using GS as a class of smart materials.…”

Section: Introductionmentioning

confidence: 99%

Parametric Excitation of Pre-Stressed Graphene Sheets under Magnetic Field: Nonlinear Vibration and Dynamic Instability

Ghadiri

Hosseini

2019

Int. J. Str. Stab. Dyn.

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Motivated by the lack of su±cient accuracy in investigation of nonlinear dynamics of graphene sheets (GS), nonlinear dynamic instability and frequency response of the pre-stressed single layered GS (SLGS) are investigated in the present paper. To achieve this aim, in the¯rst step, SLGS embedded on a visco-Pasternak foundation is modeled while it is under an initial stress and subjected to a parametric axial force and magnetic¯eld. Then, based on Eringen's theory, nonlinear von Karman relations and Kelvin-Voigt model, the nonlinear governing equation of motion is derived. In the next step, Galerkin technique and multiple time scales method are employed to analyze and solve the equation of motion. Emphasizing the e®ect of parametric excitation, for considering the instability regions, bifurcation points are discussed. As a result, a parametric study is conducted to show the importance of damping coe±cient and parametric excitation in dynamic instability of the system. Numerical examples are also treated which show various discontinuous bifurcations. Also, in¯nitely stable and unstable solutions are addressed.

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A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance

Cited by 30 publications

References 44 publications

Broadband, Tunable, Miniaturized Vibration Energy Harvester Using Nonlinear Elastomer Beams and Stretchable Interconnects

Broadband, Tunable, Miniaturized Vibration Energy Harvester Using Nonlinear Elastomer Beams and Stretchable Interconnects

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Parametric Excitation of Pre-Stressed Graphene Sheets under Magnetic Field: Nonlinear Vibration and Dynamic Instability

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