A micromachined tunable coupled-cavity laser for wide tuning range and high spectral purity

Cai, He; Liu, B.; Zhang, X. M.; Liu, A. Q.; Tamil, J.; Bourouina, Tarik; Zhang, Q. X.

doi:10.1364/oe.16.016670

Cited by 18 publications

(11 citation statements)

References 19 publications

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“…It employed two identical electrostatic comb‐drive actuators on both sides for mechanically balanced translation. Each comb‐drive actuator provided bidirectional, in‐plane translation following the actuation relationship Δ x = AV 2 , where Δ x is the displacement, V is the actuation voltage, and A = 0.04 μm V −2 the actuation coefficient 30, 31. The semi‐square split rings were formed by patterning an evaporated aluminum layer (0.5‐μm‐thick) on top of the SOI wafer.…”

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Switchable Magnetic Metamaterials Using Micromachining Processes

et al. 2011

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Metamaterials have attracted intensive research interest in recent years because their optical properties have a strong dependence on the geometry of metamaterial molecules rather than the material composition. [1][2][3] This feature has inspired the creation and tailoring of exotic properties, such as a negative refractive index, [ 4 , 5 ] perfect absorption, [ 6 ] and super lensing, [ 7 , 8 ] which are not readily available in nature. For many practical applications such as data storage [ 9 ] and optical switching, [ 10 ] switchable metamaterials that possess very different states are almost a necessity. [ 11 ] Most of the tunable metamaterials that have been demonstrated rely on tuning constituent materials or changing surrounding media by introducing natural materials with higher tunability, such as liquid crystals and phase changing materials. [12][13][14][15][16][17][18][19] However, this limits the choices of materials and becomes increasingly diffi cult to implement at higher frequencies. Moreover, the tuning range is usually too limited to achieve a switching effect between strikingly different states.A complementary approach is to mechanically reconfi gure the metamaterial molecules. [ 20 , 21 ] Micromachining technology has been developed for fabrication and actuation of micromechanical devices [22][23][24][25][26] with switching frequencies up to the GHz level. [ 27 ] An attempt was made to adjust the distance between several planar metamaterial layers in which effi cient transmission change was achieved but the tuning originated from a change in the layer structure rather than a change in metamaterial molecule. [ 22 ] Recently, another interesting work demonstrated the modifi cation of the optical properties of a metamaterial by reorienting the metamaterial molecules. [ 23 ] Inspired by these prior studies, we report the concept and design of switchable magnetic metamaterials by directly reshaping the metamaterial molecules using the micromachining technology and present working devices with switchable magnetic responses.The schematic diagram of the switchable magnetic metamaterial is shown in Figure 1 a. Each metamaterial molecule consists of two semi-square split rings. One is anchored on the substrate while the other can be moved by micromachined actuators. As a result, the gap between the split rings can be altered and thus the geometric shape of the metamaterial molecule can be changed. Figure 1 b-d illustrates the two semi-square spit rings in different states. In Figure 1 b, the two split rings are separated by a small gap, resulting in a geometric shape "[]". This is a typical split ring resonator. [ 28 ] For simple notation, this state is called the open-ring state. Figure 1 c,d show two extreme cases. In the former, the gap between the two split rings is closed and the actual metamaterial molecule becomes a closed ring in the "ٗ" shape. This is called the closed-ring state. In the latter, the movable ring is moved away until it touches the back side of the fi xed ring in the next metama...

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Switchable Magnetic Metamaterials Using Micromachining Processes

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“…Each actuator provides bidirectional in-plane translation (along x-direction) following the actuation relationship Dx ¼ AV 2 , where Dx is the displacement, V the actuation voltage, and A ¼ 0.05 lm/V 2 the actuation coefficient. 23,24 Fig. 2(b) shows a close-up view of the unit cells.…”

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Polarization dependent state to polarization independent state change in THz metamaterials

Zhu

Liu

Zhang

et al. 2011

Applied Physics Letters

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We experimentally demonstrated a polarization dependent state to polarization independent state change in terahertz (THz) metamaterials. This is accomplished by reconfiguring the lattice structure of metamaterials from 2-fold to 4-fold rotational symmetry by using micromachined actuators. In experiment, it measures resonance frequency shift of 25.8% and 12.1% for TE and TM polarized incidence, respectively. Furthermore, single-band to dual-band switching is also demonstrated. Compared with the previous reported tunable metamaterials, lattice reconfiguration promises not only large tuning range but also changing of polarization dependent states, which can be used in photonic devices such as sensors, optical switches, and filters. V

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“…Submillimeter Fabry-Pérot ͑FP͒ resonators with free space propagation, became important building blocks for many applications, namely, in tunable laser sources, 1 refractometry, 2 wavelength selection in optical communication, 3 as well as chemical sensing. 4 Tunability of the cavity length is also being routinely integrated thanks to the recent advances in microelectromechanical systems technologies.…”

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Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor

Malak

Pavy

Marty

et al. 2011

Applied Physics Letters

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We demonstrate experimentally optical quality factor of nearly 9000 in a micromachined Fabry–Pérot resonator based on free space propagation of light and direct coupling to optical fibers. This result is obtained on long cavity resonators (L>250 μm), a usually difficult case in terms of power loss, but very useful configuration for experiments requiring either long optical path or enough space for manipulation. The resonator architecture includes two multilayered silicon-air Bragg mirrors of cylindrical shape, combined with a fiber rod lens. The specific stability criteria are derived for the proposed resonator architecture. Dimensions of the fabricated devices are chosen accordingly.

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A micromachined tunable coupled-cavity laser for wide tuning range and high spectral purity

Cited by 18 publications

References 19 publications

Switchable Magnetic Metamaterials Using Micromachining Processes

Switchable Magnetic Metamaterials Using Micromachining Processes

Polarization dependent state to polarization independent state change in THz metamaterials

Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor

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