A micromachined angular-acceleration sensor for geophysical applications

Liu, Huafeng; Pike, W. T.

doi:10.1063/1.4966547

Cited by 44 publications

(25 citation statements)

References 15 publications

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“…Several of these new micro-sensors are based on capacitive transduction [7], [8], [9] and [10]. In particular, capacitive sensors are frequently used in accelerometers and gyroscopes [9].…”

Section: Introductionmentioning

confidence: 99%

“…Several of these new micro-sensors are based on capacitive transduction [7], [8], [9] and [10]. In particular, capacitive sensors are frequently used in accelerometers and gyroscopes [9]. Many researchers are also studying the use of micro-sensors in biomedical applications where flexible devices that can function in the circulatory or urinary system and even in the brain to measure pressure, temperature, electrical and chemical measurements will be needed in the future [11]–[16].…”

Section: Introductionmentioning

confidence: 99%

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Transparent Flexible Active Faraday Cage Enables In Vivo Capacitance Measurement in Assembled Microsensor

2017

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Capacitive micro-sensors such as accelerometers, gyroscopes and pressure sensors are increasingly used in the modern electronic world. However, the in vivo use of capacitive sensing for measurement of pressure or other variables inside a human body suffers from significant errors due to stray capacitance. This paper proposes a solution consisting of a transparent thin flexible Faraday cage that surrounds the sensor. By supplying the active sensing voltage simultaneously to the deformable electrode of the capacitive sensor and to the Faraday cage, the stray capacitance during in vivo measurements can be largely eliminated. Due to the transparency of the Faraday cage, the top and bottom portions of a capacitive sensor can be accurately aligned and assembled together. Experimental results presented in the paper show that stray capacitance is reduced by a factor of 10 by the Faraday cage, when the sensor is subjected to a full immersion in water.

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“…Several of these new micro-sensors are based on capacitive transduction [7], [8], [9] and [10]. In particular, capacitive sensors are frequently used in accelerometers and gyroscopes [9].…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Transparent Flexible Active Faraday Cage Enables In Vivo Capacitance Measurement in Assembled Microsensor

2017

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“…MEMS‐based devices usually utilize a vibrating proof mass that responds to motion in specific directions while attenuating others. Angular MEMS accelerometers (Figure ) use this principle as well . A proof mass (a) is attached to a cover plate (b) at a single anchor (c) using flexural springs.…”

Section: Angular Acceleration Technologiesmentioning

confidence: 99%

Angular accelerometer‐based inertial navigation system

2019

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Angular acceleration sensors technologies are evolving and emerging in various applications. In this paper, we propose an angular accelerometer-based inertial navigation system. One application of such systems can be highly maneuvering platforms where direct measurement of angular acceleration is desired. To that end, a review of modern angular acceleration sensor technologies and their possible applications is provided. Two angular acceleration-

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“…Such a setup of buried permanent gravimeters is presently impossible to realize with CG5 or any other contemporary relative or absolute gravimeter, but remains realistic at a few-years timescale. Indeed, a new generation of relative gravimeters is rising from the use micro-electro-mechanical systems (MEMS) technology, characterized by a significantly smaller size and lower price (Liu and Pike, 2016;Middlemiss et al, 2016Middlemiss et al, , 2017. Those shoebox-sized devices could be used to set permanent and dense gravity networks in areas experiencing vigorous sediment transport.…”

Section: Perspectives From Recent Progresses In Gravimetrymentioning

confidence: 99%

Quantifying sediment mass redistribution from joint time-lapse gravimetry and photogrammetry surveys

Mouyen¹,

Steer²,

Chang³

et al. 2019

Preprint

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Abstract. The accurate quantification of sediment mass redistribution is central to the study of surface processes, yet it remains a challenging task. Here we test a new combination of terrestrial gravity and drone photogrammetry methods to quantify sediment redistribution over a 1-km2 area. Gravity and photogrammetry are complementary methods. Indeed, gravity changes are sensitive to mass changes and to their location. Thus, by using photogrammetry data to constrain this location, the sediment mass can be properly estimated from the gravity data. We carried out 3 joint gravity-photogrammetry surveys, once a year in 2015, 2016 and 2017 over a 1-km2 area in southern Taiwan featuring both a wide meander of the Laonong River and a slow landslide. We first removed the gravity changes from non-sediment effects, such as tides, groundwater, surface displacements and air pressure variations. Then, we inverted the density of the sediment, with an attempt to distinguish the density of the landslide from the density of the river sediments. We eventually estimate an average loss of 4.7 ± 0.4 × 109 kg of sediment from 2015 to 2017, mostly due to the slow landslide. Although the gravity devices used in this study are expensive and need week-long surveys, new instrumentation progresses shall enable dense and continuous measurements at lower cost, making this method relevant to improve the estimation of erosion, sediment transfer and deposition in landscapes.

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A micromachined angular-acceleration sensor for geophysical applications

Abstract: Microelectromechanical tunneling sensor fabrication and post-processing characterization using focused ion beams J.

Cited by 44 publications

References 15 publications

Transparent Flexible Active Faraday Cage Enables In Vivo Capacitance Measurement in Assembled Microsensor

Transparent Flexible Active Faraday Cage Enables In Vivo Capacitance Measurement in Assembled Microsensor

Angular accelerometer‐based inertial navigation system

Quantifying sediment mass redistribution from joint time-lapse gravimetry and photogrammetry surveys

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