A Microfluidic MEMS-Microbalance Platform With Minimized Acoustic Radiation in Liquid

Mansoorzare, Hakhamanesh; Shahraini, Sarah; Todi, Ankesh; Azim, Nilab; Khater, Darina; Rajaraman, Swaminathan; Abdolvand, Reza

doi:10.1109/tuffc.2019.2955402

Cited by 10 publications

(4 citation statements)

References 37 publications

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“…The shape of contour mode resonators is defined by etched side walls that create a solid-free boundary. Contour mode MEMS resonators generally work well when the liquid that contacts the resonator is dispensed as a droplet, but practical problems arise when the setup involves sealing the resonator within a microfluidic cell that holds the liquid [25][26][27][28][29]. There are several good reasons for using a microfluidic cell to create a liquid-filled enclosed environment in the sensing setup.…”

Section: Microelectromechanical (Mems) Resonators Have Been Onmentioning

confidence: 99%

“…If the planar surface of the resonator exposed to ambient pressure is unsealed, then the microfluidic cell fails to serve its purpose of providing an isolated liquid-filled environment because the liquid will continue to evaporate. If the planar surface of the resonator exposed to ambient pressure is instead sealed [28], then the liquid will fill the air cavity to reach equilibrium. With liquid surrounding all surfaces of the resonator (top and bottom planes and side gaps), viscous damping inevitably increases, and Q will consequentially decrease.…”

Section: Microelectromechanical (Mems) Resonators Have Been Onmentioning

confidence: 99%

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Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

Begum¹,

Qian²,

Lee³

2021

J. Micromech. Microeng.

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This paper investigates the characteristics of higher-order transverse mode fully clamped membrane resonators that are piezoelectrically transduced as a class of resonators that completely seal the domain above the resonator from the domain below. Such isolation between the top and bottom of a resonator is preferable when encasing the device in a microfluidic cell for liquid-phase sensing measurements, a setup that can be beneficial for sensing applications. Most fully clamped membrane resonators are hampered by low liquid-phase quality factor (Q) and large motional resistance (R m). This paper describes the design of higher-order transverse (2, 2) mode square membrane and (2, 0) mode circular membrane resonators, and the effect of device scaling on liquid-phase Q and R m. We show a best-case liquid-phase R m of 54 kΩ and Q of 270 among the various membrane sizes tested. This level of liquid-phase Q is higher than some contour mode resonators. Compared to other fully clamped membrane resonators in the literature, the results here represent a significant improvement in both R m and Q, highlighting the potential of these membrane resonators for liquid-phase mass sensing applications.

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Section: Microelectromechanical (Mems) Resonators Have Been Onmentioning

confidence: 99%

Section: Microelectromechanical (Mems) Resonators Have Been Onmentioning

confidence: 99%

Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

Begum¹,

Qian²,

Lee³

2021

J. Micromech. Microeng.

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“…[1][2][3][4][5] Due to the brilliant piezoelectric coefficients superior to AlN (d 33 = 5 pC N -1 ), AlScN (d 33 = 25 pC N -1 ) has attracted extensive attentions in micro-electromechanical system (MEMS) applications related with bulk acoustic waves (BAWs) and surface acoustic waves (SAWs), [6][7][8][9] such as acoustic sensors, energy harvesters and radiofrequency (RF) filters. [10][11][12][13][14][15] AlScN is an ideal candidate to implement AO coupling interactions on SOI platform.…”

Section: Introductionmentioning

confidence: 99%

Acousto‐Optic Modulation in Silicon Waveguides Based on Piezoelectric Aluminum Scandium Nitride Film

Huang

Shi

et al. 2022

Advanced Optical Materials

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In recent years, piezoelectric materials, such as AlN, lithium niobate (LN) and GaAs, are frequently applied to acoustooptic (AO) coupling interactions with great potentials. [16][17][18][19][20][21][22][23][24] With a travelling SAW actuated by the interdigital transducer (IDT), the optical waves in waveguides are scattered by the travelling refractive index gratings and frequencyshifted through Doppler effect. [25] The AO coupling in piezoelectric materials offers a promising way to implement on-chip AO modulation, microwave photonic filtering, acousto-optic frequency shift, and nonreciprocal light propagation. [16,17,26,27] Different from the intrinsic optomechanical interactions in waveguides, [28][29][30][31][32][33][34] it is unnecessary to design suspended waveguides or optomechanical cavities for the AO interactions, which guarantees the stability and feasibility for on-chip applications. [16,35] Meanwhile, the electrically driven AO interactions exhibit higher AO scattering efficiency than the intrinsic optomechanical interactions, which can be adjusted in both optical domain and electrical domain. [36,37] Although LN (d 33 = 6 pC N -1 ) is a good candidate in AO interactions for its outstanding optical and piezoelectric properties, [38] it is not compatible with complementary metal-oxide-semiconductor (CMOS) technology to achieve large-scale fabrication. [20][21][22] As for AlN, it is generally deposited on silicon substrate through magnetic sputtering that is compatible with CMOS technology, but it poses a challenge to design waveguide structures in AlN layer because of the smaller refractive index than silicon substrate. [17,18] Therefore, suspended waveguide structures are indispensable for AlN on silicon substrate to carry out AO interactions. Surprisingly, a nonsuspended structure of AlN deposited on silicon-on-insulator (SOI) platform with a SiO 2 interlayer had realized AO modulation recently, where the optical wave is mostly confined in the nonpiezoelectric silicon layer instead of AlN layer. [39] In that structure, the SAW actuated by the IDT propagates from AlN layer across SiO 2 interlayer and finally modulates the optical waves in the silicon waveguides, where the SiO 2 interlayer greatly increases the SAW propagation loss and degrades the acoustic performances. [40] At last, with the same CMOS-compatible deposition as AlN and better piezoelectric properties than AlN, Aluminum scandium nitride (AlScN) has attracted extensive attention for its excellent piezoelectric properties in the micro-electromechanical system applications. In this work, AlScN is demonstrated to be a promising candidate for on-chip acousto-optic coupling interactions with outstanding piezoelectric properties as well. Based on piezoelectric Al 0.6 Sc 0.4 N film deposited on silicon-on-insulator platform, the proposed devices exhibit impressive acousto-optic coupling performances over a short interaction length of 210 µm with surface acoustic waves actuated by interdigital transducers. Meanwhile, the acousto-optic coupling...

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“…Regarding analytical tools, there has long been interest in applying microelectromechanical system (MEMS) resonators for mass-based sensing given their high sensitivity, low volume sample requirements, and digitized readouts 5,6 . Thin-film piezoelectric-on-silicon (TPoS) MEMS resonators comprise a thin piezoelectric layer (e.g., aluminum nitride (AlN)) deposited on a thicker silicon carrier and have been of interest for liquid-phase measurements 7,8 . The working principle of a TPoS MEMS resonator starts with the actuation the resonator through the application of a harmonic voltage signal across the piezoelectric transducer.…”

Section: Introductionmentioning

confidence: 99%

Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements

2021

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The ability to weigh microsubstances present in low concentrations is an important tool for environmental monitoring and chemical analysis. For instance, developing a rapid analysis platform that identifies the material type of microplastics in seawater would help evaluate the potential toxicity to marine organisms. In this study, we demonstrate the integration of two different techniques that bring together the functions of sparse particle localization and miniaturized mass sensing on a microelectromechanical system (MEMS) chip for enhanced detection and minimization of negative measurements. The droplet sample for analysis is loaded onto the MEMS chip containing a resonant mass sensor. Through the coupling of a surface acoustic wave (SAW) from a SAW transducer into the chip, the initially dispersed microparticles in the droplet are localized over the detection area of the MEMS sensor, which is only 200 µm wide. The accreted mass of the particles is then calibrated against the resulting shift in resonant frequency of the sensor. The SAW device and MEMS chip are detachable after use, allowing the reuse of the SAW device part of the setup instead of the disposal of both parts. Our platform maintains the strengths of noncontact and label-free dual-chip acoustofluidic devices, demonstrating for the first time an integrated microparticle manipulation and real-time mass measurement platform useful for the analysis of sparse microsubstances.

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A Microfluidic MEMS-Microbalance Platform With Minimized Acoustic Radiation in Liquid

Cited by 10 publications

References 37 publications

Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

Acousto‐Optic Modulation in Silicon Waveguides Based on Piezoelectric Aluminum Scandium Nitride Film

Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements

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