2022
DOI: 10.1063/5.0089732
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A microfabricated fiber-integrated diamond magnetometer with ensemble nitrogen-vacancy centers

Abstract: Miniaturization is a trend of development toward practical applications for diamond nitrogen-vacancy centers-based sensors. We demonstrate a compact diamond magnetic field sensor device using a standard microfabrication process. A single-crystal-diamond plate is embedded in a cavity formed with stacking of three silicon chips. Thermal compression bonding is implemented at silicon–silicon and diamond–silicon interfaces ensuring mechanical robustness. The specific construction volume for the essential sensor com… Show more

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Cited by 15 publications
(2 citation statements)
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“…In Figure 2d, the Ω pattern on the diamond is used to generate a MW field with a uniformity of 88.5% for NV spin state manipulation. [ 31 ] The wafer‐level microfabrication approach [ 32 ] is used to prepare the diamond chip (Figure 2e,f). The diamond is bonded to the silicon wafer by a metallic thermo‐compression bonding.…”
Section: Principle and Methodsmentioning
confidence: 99%
“…In Figure 2d, the Ω pattern on the diamond is used to generate a MW field with a uniformity of 88.5% for NV spin state manipulation. [ 31 ] The wafer‐level microfabrication approach [ 32 ] is used to prepare the diamond chip (Figure 2e,f). The diamond is bonded to the silicon wafer by a metallic thermo‐compression bonding.…”
Section: Principle and Methodsmentioning
confidence: 99%
“…Because of the limitations of the laser sources themselves, the use of high laser power can result in significant laser fluctuation noise. Xie et al used noise cancellation to mitigate the effects of the laser fluctuation noise, thereby improving the magnetic field resolution by an order of magnitude to achieve an optimal magnetic field resolution of 2.03 nT/Hz 1/2 [13]. Wolf et al mitigated the optical noise caused by the high laser power required in pulse spin echo measurements by increasing the correlation time to exceed the laser pulse duration, which resulted in a final magnetic field magnetic field resolution of 0.9 pT/Hz 1/2 [14].…”
Section: Introductionmentioning
confidence: 99%