2009
DOI: 10.1016/j.sna.2009.07.012
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A microfabricated and microassembled wireless resonator

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(1 citation statement)
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“…In principle, since the ultrasonic signals only need to travel through the media once, this approach offers twice the penetration depth than the active mode . Flückiger et al showed the manufacturing of a hybrid acoustic microrobotic transmitter by means of microfabrication (photolithography, electrodeposition, selective etching) and robotic microassembly . The transmitters consisted of two gold architectures separated by a polymeric spacer: (a) a bottom gold layer containing a magnetic micropart in the center; and (b) a gold structure comprising two beam springs, which were used to hold a magnetic microstructure in the center (Figure b).…”
Section: Imaging Technologies For Micro‐ and Nanoswimmersmentioning
confidence: 99%
“…In principle, since the ultrasonic signals only need to travel through the media once, this approach offers twice the penetration depth than the active mode . Flückiger et al showed the manufacturing of a hybrid acoustic microrobotic transmitter by means of microfabrication (photolithography, electrodeposition, selective etching) and robotic microassembly . The transmitters consisted of two gold architectures separated by a polymeric spacer: (a) a bottom gold layer containing a magnetic micropart in the center; and (b) a gold structure comprising two beam springs, which were used to hold a magnetic microstructure in the center (Figure b).…”
Section: Imaging Technologies For Micro‐ and Nanoswimmersmentioning
confidence: 99%