1998
DOI: 10.1063/1.1149144
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A microcontroller-based system for piezoscanner nonlinearity correction: Atomic force microscope

Abstract: Scanning probe microscopes use piezoelectric actuators ͑piezoscanners͒ as extremely sensitive and exact positioners for small scaled sample scannings. They are capable of making fine movements along the X, Y, and Z axes, with displacements that can vary from several hundreds of angstroms to some micrometers. For high amplitude sweeps, the displacement response results in visible distortions due to the intrinsic nonlinearity effects of the piezoelectric tube. This work proposes the nonlinearity correction by me… Show more

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