A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Kanda, Takefumi; Makino, A.; Ono, Takeya; Suzumori, Koichi; Morita, Takeshi; Kurosawa, Minoru Kuribayashi

doi:10.1016/j.sna.2005.10.056

Cited by 127 publications

(56 citation statements)

References 10 publications

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“…Examples of stators with degenerate bending modes include Morita, et al's hollow titanium cylinder (1.4 mm in diameter, 5 mm in length) with thin-film PZT deposited on the surface [36], and Kanda, et al's micro-machined bulk PZT cylinder (0.8 mm in diameter, 2.2 mm in length) with a nickel electrodes plated on the inner and outer surface [37] (see Table 2 for their performance). The design allows detailed control over the stator trajectory; the rotor's motion can be reversed by shifting the phase lag between the two inputs by 180…”

Section: Motor Designsmentioning

confidence: 99%

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Liu

Friend

Yeo

2010

Acoust. Sci. & Tech.

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Though miniaturization and mass production via integrated circuit fabrication techniques have transformed our society, the methods have yet to be successfully applied to the generation of motion, and as a consequence the many potential benefits of microrobotics has yet to be realized. The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. The scaling analyses show that electrostatic, electromagnetic and piezoelectric actuators all have comparable force scaling characteristics of F / L 2 ; if one employs permanent magnets, electromagnetic forces do not scale as F / L 4 . Though the torque, (, of piezoelectric ultrasonic motors scale rather poorly with ( / L 4 , they have the clear advantage of possessing torque amplitudes some two orders of magnitude larger than motors employing the other transduction schemes at the micro scale.

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Section: Motor Designsmentioning

confidence: 99%

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Liu

Friend

Yeo

2010

Acoust. Sci. & Tech.

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“…The development of new methods to study the responses of materials and devices to thermal stimuli could enable new fundamental insights and applications in micro-robotics [1][2][3][4], thermal-electric generators [5][6][7], and biomedical sensors [8][9][10][11]. The thermal-electrical response is also important from an energy scavenging perspective, as 60% of energy currently produced from all sources in the United States is lost in the form of wasted heat [12].…”

Section: Introductionmentioning

confidence: 99%

Pyro-paraelectricity

Chin

Sheng

Huang

et al. 2015

Extreme Mechanics Letters

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The electrical responses of materials and devices subjected to thermal inputs, such as the Seebeck effect and pyroelectricity, are of great interest in thermal-electric energy conversion devices. Of particular interest are phenomena which exploit heterogeneities in the mechanics of heterostructured materials and systems for novel and unexplored thermal-electric responses. Here we introduce a new mechanism for converting thermal stimuli into electricity via structural heterogeneities, which we term "pyro-paraelectricity." Specifically, when a paraelectric material is grown on a substrate with a different lattice constant, the paraelectric layer experiences an inhomogeneous strain due to the lattice mismatch, establishing a strain gradient along the axis of the layer thickness. This strain gradient, induced via the lattice mismatch, can be multiple orders of magnitude higher than strain gradients in bulk materials imparted by mechanical bending (0.1 m -1 ). Consequently, charge separation is induced in the paraelectric layer via flexoelectricity, leading to a polarization in proportion to the dielectric constant. The dielectric constant, and thus the polarization, in turn changes with temperature. Therefore, when a strained metal-insulator-metal (MIM) heterostructure is subjected to a thermal input, changes in the permittivity generate an electrical response. We demonstrate this concept of "pyro-paraelectricity" by employing a MIM heterostructure with a high permittivity sputtered barium strontium titanate (BST) film as the insulating layer in a platinum sandwich. The resulting strain gradient of more than 10 4 m -1 due to the structural heterogeneity was verified by an X-ray diffraction scan. To demonstrate "pyro-paraelectricity," the MIM heterostructure was subjected to a thermal input, thereby generating current which was highly correlated to the thermal input. A theoretical model was found to be consistent with the experimental data. These results prove the existence of "pyro-paraelectricity."

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“…The motor's main feature was that it could rotate at higher speeds -4 -than motors previously developed under these conditions. Ultrasonic motors can generally be easily downsized due to their driving principles [9]- [13]. Some of these have been used in several specific environments [14]- [16].…”

Section: Introductionmentioning

confidence: 99%

An ultrasonic motor for cryogenic temperature using bolt-clamped Langevin-type transducer

Yamaguchi

Kanda

Suzumori

2012

Sensors and Actuators A: Physical

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Abstract：In this study, a small ultrasonic motor driven under cryogenic temperature conditions has been fabricated and evaluated.Since transducer performance generally decreases at cryogenic temperatures, we designed and fabricated a bolt-clamped Langevin-type transducer for operation at cryogenic temperature. We simulated the influence of thermal stress on the transducer. The results from simulation were used to design the transducer, and it was then used to fabricate an ultrasonic motor for cryogenic temperature. The maximum diameter and the height of the motor are 30 mm and 38.7 mm.To enable the motor to be driven at cryogenic temperature, we evaluated the relationship between the contact pre-load and the lowest rotatable temperature. The motor's driving performance was evaluated at both room temperature and cryogenic temperatures. In a 4.5 K helium gas ambient, the rotation speed and starting torque were 133 rpm and 0.03 μNm when the applied voltage was 50 V p-p .

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A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Cited by 127 publications

References 10 publications

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Pyro-paraelectricity

An ultrasonic motor for cryogenic temperature using bolt-clamped Langevin-type transducer

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