Abstract:Mechanical testing of micro/nano-materials is very important for design, performance realization, and reliability analysis of micro/nano-electromechanical systems. Mechanical characterization of micro/nano-materials is rather difficult in the handling and alignment of the specimens, measurement of the displacement, and the load for both the off-chip testing method and the integrated on-chip testing method. In this article, a micro-tensile testing chip-integrated piezoresistive cells and a specimen are develope… Show more
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