A micro-SPM head array with exchangeable cantilevers

Gao, Shuang; Wolff, Helmut; Herrmann, Konrad; Brand, Uwe; Hiller, Karla; Hahn, S.; Sorger, A.; Mehner, Jan

doi:10.1117/12.922641

Cited by 2 publications

(4 citation statements)

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“…An existing MEMS array, which was designed for the parallel probing of surfaces, and which consists of seven single MEMS placed next to each other [11,12], was used to create the double spring. A cantilever holder (figure 1) designed for other tasks had to be removed by using Focused Ion Beam (FIB) machining (figure 2).…”

Section: Device Design and Fabricationmentioning

confidence: 99%

“…This principle was realized for the first time by silicon bending springs for instrumented indenters [9]. In this paper the same principle was applied by using an existing micro-electro-mechanical system (MEMS), already consisting of two springs with a gap of about 3 μm [11,12]. The device is intended to be used to calibrate the unknown stiffness of an external device, and the 3 μm gap between the two springs is intended to be used as a dimensional reference for the calibration of the displacement and the force of an external device.…”

Section: Introductionmentioning

confidence: 99%

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Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Brand

Gao

et al. 2015

Meas. Sci. Technol.

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A new reference spring for the simultaneous calibration of probing force and displacement has been developed. The spring consists of two single silicon springs, which are placed at a distance of 3 μm from each other. Each single spring consists of a moveable shaft, which is suspended and guided by four double-folded silicon springs. This leads to a much higher stiffness of the spring perpendicular to the direction of movement than in the direction of movement. The area of contact of the double spring has a size of 50 μm × 60 μm. However, measurable changes in the calibration parameters could not be observed when we varied the location of the loading point within this area. Furthermore, it could be shown for measurements at different temperatures that the calibration parameters also show a very small dependence on temperature (<0.4%/K between 22 °C and 23 °C). A further outstanding property of this new reference spring is its small non-linearity of the force deflection curve of 0.1%. The spring can be used for the calibration of force and the displacement of atomic force microscopes, nanoindenters, and stylus instruments in the micro-Newton range up to 12 μN and up to 3 μm displacements.

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Section: Device Design and Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Brand

Gao

et al. 2015

Meas. Sci. Technol.

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“…It offers a linear movement of about 10 µm in only one direction. Applications are tensile testing of nanometre thin free standing films [10], nanoindentation [8,9], scanning-probe microscopy (AFM) [11,12] and the calibration of AFM cantilever normal spring constant [13]. Silicon is due to its excellent linear elastic behaviour also the material of choice when designing calibration standards for piezoresistive elements Si-wafer boss probing pin membrane 4\ probing sphere dimensional metrology.…”

Section: Introductionmentioning

confidence: 99%

“…For fast topography measurements arrays consisting of seven single MEMS (s.Fig. 7)were fabricated with a lower stiffness of 3 N/m[11,12]. MEMS arrays containing MEMS with stiffnesses ranging from 0.5 N/m to 100 N/m are currently fabricated for the calibration of AFM cantilever normal spring constant.…”

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confidence: 99%

Smart sensors and calibration standards for high precision metrology

et al. 2015

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The paper summarize the PTB activities in the field of silicon sensors for dimensional metrology especially roughness measurements and silicon calibration standards developed during the past ten years. A focus lies in the development of 2D silicon microprobes which enable roughness measurements in nozzles as small as 100 µm in diameter. Moreover these microprobes offer the potential for very fast tactile measurements up to 15 mm/s due to their tiny mass and therefore small dynamic forces. When developing high precision tactile sensors care has to be taken, not to scratch the often soft surfaces. Small probing forces and well defined tip radii have to be used to avoid surface destruction. Thus probing force metrology and methods to determine the radius and form of probing tips have been developed. Silicon is the preferred material for the calibration of topography measuring instruments due to its excellent mechanical and thermal stability and due to the fabrication and structuring possibilities of silicon microtechnology. Depth setting standards, probing force setting standards, tip radius and tip form standards, reference springs and soft material testing artefacts will be presented.

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A micro-SPM head array with exchangeable cantilevers

Cited by 2 publications

References 0 publications

Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Smart sensors and calibration standards for high precision metrology

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