2013
DOI: 10.1063/1.4806983
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A micro seismometer based on molecular electronic transducer technology for planetary exploration

Abstract: This letter describes an implementation of micromachined seismometer based on molecular electronic transducer (MET) technology. As opposed to a solid inertial mass, MET seismometer senses the movement of liquid electrolyte relative to fixed electrodes. The employment of micro-electro-mechanical systems techniques reduces the internal size of the sensing cell to 1 lm and improves the reproducibility of the device. For operating bias of 600 mV, a sensitivity of 809 V=ðm=s 2 Þ was measured under acceleration of 4… Show more

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Cited by 39 publications
(19 citation statements)
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“…For the commercial sensors the sensitive cell consists of four mesh electrodes sandwiched together with three porous dielectric ceramic spacers [5]. Alternative configurations for sensitive cells have been reported recently [6][7][8][9]. External electrodes (anodes) are connected to positive potential relative to the internal ones (cathodes).…”
Section: Methodsmentioning
confidence: 99%
“…For the commercial sensors the sensitive cell consists of four mesh electrodes sandwiched together with three porous dielectric ceramic spacers [5]. Alternative configurations for sensitive cells have been reported recently [6][7][8][9]. External electrodes (anodes) are connected to positive potential relative to the internal ones (cathodes).…”
Section: Methodsmentioning
confidence: 99%
“…The interaction of the chemical reaction and fluid motion in the form of the proportional ion concentration gradient ∇C generated by acceleration a causes the current between the anodes and cathodes to change. The differential current from the two cathodes, which is the output of the sensing element, also forms the input to the signal conditioning circuit for the next process [6][7][8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…Nevertheless, the solution of the task of high-precision finding of the azimuth direction with the help of this method is achievable with the use of a more sensitive and accurate angular sensor. Molecularelectronic technology-based angular sensor [7][8][9][10] can be used in this case. The described solution is implemented in the patent [11].…”
Section: Introductionmentioning
confidence: 99%