A micro interdigitated thin film metal oxide capacitive sensor for measuring moisture in the range of 175–625 ppm

Islam, Tarikul; Nimal, A.T.; Mittal, Upendra; Sharma, M.U.

doi:10.1016/j.snb.2015.06.101

Cited by 53 publications

(25 citation statements)

References 30 publications

(63 reference statements)

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“…When these two capacitors are connected in parallel, the sensitivity is enhanced almost two-fold but the actual size remains unchanged. Also, this structure prevents the wastage of very useful dip-coated film on the opposite side of the substrate as reported previously in [7,9,14,16,17,[21][22][23]. The proposed method of sensitivity enhancement is easy, simple, and less time consuming.…”

Section: Introductionmentioning

confidence: 83%

“…The steps of the fabrication process remain the same as in the case of a single sided capacitive trace moisture sensor [6][7][8][12][13][14][15][16][17][18][19][20][21][22]. Two gold electrodes are deposited on each side of an alumina substrate (19 mm × 19 mm × 1 mm) by the screen printing method.…”

Section: Procedures To Fabricate the Devicementioning

confidence: 99%

“…However, the number of research papers for ppm level moisture detection is very low [5]. The cost of a commercial ppm level moisture sensor is at least fifty times higher than that of RH sensors [6,7].…”

Section: Introductionmentioning

confidence: 99%

“…Among the different methods of alumina film preparation, the sol-gel method is a simple, less expensive method to prepare a pure ceramic thin film of desired thickness. The film can be formed on the ceramic substrate by the dip coating, spin coating or spray coating method [1,2,[6][7][8][9][10]. Incomparison to other ceramic materials, aluminum oxide (Al 2 O 3 ) is highly hydrophilic and it is one of the most useful materials for moisture measurement in most industrial gases [4,10,11].…”

Section: Introductionmentioning

confidence: 99%

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Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

2017

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Abstract:Measurement of moisture at ppm or ppb level is very difficult and the fabrication of such sensors at low cost is always challenging. High sensitivity is an important parameter for trace level (ppm) humidity sensors. Anelectronic detection circuit for interfacing the humidity sensor with high sensitivity requires a simple hardware circuit with few active devices. The recent trends for increasing the sensitivity include fabricating nanoporous film with a very large surface area. In the present work, the sensitivity of a parallel plate capacitive type sensor with metal oxide sensing film has been significantly improved with an aim to detect moisture from 3 to 100 ppm in the industrial process gases used to fabricate semiconductors and other sensitive electronic devices. The sensitivity has been increased by (i) fabricating a nanoporous film of aluminum oxide using the sol-gel method and (ii) increasing the cross-sectional area of a parallel plate capacitor. A novel double sided capacitive structure has been proposed where two capacitors have been fabricated-one on the top and one on the bottom side of a flat alumina substrate-and then the capacitors are connected in parallel. The structure has twice the sensitivity of a single sensor in the same ppm range but the size of the structure remains unchanged. The important characteristics of the sensors such as the sensitivity (S = ∆C ∆ppm × 100), the response time (t r ), and the recovery time (t c ) are determined and compared with a commercial SHAW, UKdew point meter. The fabricated double sided sensor has comparable sensitivity (S = 100%, t r (s) = 28, t c (s) = 40) with the commercial meter (S = 100.5%, t r (s) = 258) but has a faster response time. The proposed method of sensitivity enhancement is simple, and mass producible.

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Section: Introductionmentioning

confidence: 83%

Section: Procedures To Fabricate the Devicementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

2017

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“…The solution was then peptized and refluxed to get transparent sol. The details of sol preparation are discussed in [5]- [8]. The thin film of metal oxide is deposited on the substrate using a dip coating method.…”

Section: A Fabrication Of the Cross Conductance-based Humidity Sensormentioning

confidence: 99%

A Novel Humidity Sensor Based on the Extension of Thompson and Lampard Theorem

Islam

Zargar

Rehman

2015

IEEE Trans. Electron Devices

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This paper deals with the development of an accurate and precise humidity sensor, which is based on the extension of Thompson and Lampard theorem and a sol-gelbased thermally and chemically stable metal oxide thin film. In light of the extension of the theorem, most appropriate conductors are shaped around the material and the resulting sensor has cross conductance, which is the function of thickness only. It is fabricated and tested for different ranges of humidity. It is found that the fabricated sensor has outstanding static and dynamic characteristics.

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On the Integration of Dielectrometry into Electrochemical Impedance Spectroscopy to Obtain Characteristic Properties of a Dielectric Thin Film

et al. 2021

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We demonstrate a novel impedimetric approach providing unprecedented insight into characteristic properties of dielectric thin films covering electrode surfaces. The concept is based on the joint interpretation of electrochemical impedance spectroscopy (EIS) together with dielectrometry (DEM) whose informative value is mutually interconnected. The advantage lies in the synergistic compensation of individual shortcomings ad-versely affecting conventional impedimetric analysis strategies relying exclusively on either DEM or the traditional EIS approach, which in turn allows a reliable determination of thickness and permittivity values. The versatility of the method proposed is showcased by an in-situ growth-monitoring of a nanoporous, crystalline thin film (HKUST-1) on an interdigitated electrode geometry.

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A micro interdigitated thin film metal oxide capacitive sensor for measuring moisture in the range of 175–625 ppm

Cited by 53 publications

References 30 publications

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

A Novel Humidity Sensor Based on the Extension of Thompson and Lampard Theorem

On the Integration of Dielectrometry into Electrochemical Impedance Spectroscopy to Obtain Characteristic Properties of a Dielectric Thin Film

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