A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering

He, Xianming; Wen, Quan; Lu, Zhuang; Shang, Zhengguo; Zhang, Wen

doi:10.1016/j.apenergy.2018.07.001

Cited by 33 publications

(18 citation statements)

References 26 publications

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“…where (EI)i, μi, xi and hi represent bending stiffness, the linear density, the coordinate, and the bending displacement of the ith section, respectively; t is the time. The method of separation of variables can be used to solve Equation (1) by separating the spatial and temporal functions as ( , ) ( ) ( ) [31]. Thus, we can obtain:…”

Section: Device Structure and Modal Analysismentioning

confidence: 99%

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A Flutter-Based Electromagnetic Wind Energy Harvester: Theory and Experiments

Wen

et al. 2019

Applied Sciences

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Wind energy harvesting is a promising way to offer power supply to low-power electronic devices. Miniature wind-induced vibration energy harvesters, which are currently being focused on by researchers in the field, offer the advantages of small volume and simple structure. In this article, an analytical model was proposed for the kinetic analysis of a flutter-based electromagnetic wind energy harvester. As a result, the critical wind speeds of energy harvesters with different magnet positions were predicted. To experimentally verify the analytical predictions and investigate the output performance of the proposed energy harvester, a small wind tunnel was built. The critical wind speeds measured by the experiment were found to be consistent with the predictions. Therefore, the proposed model can be used to predict the critical wind speed of a wind belt type energy harvester. The experimental results also show that placing the magnets near the middle of the membrane can result in lower critical wind speed and higher output performance. The optimized wind energy harvester was found to generate maximum average power of 705 μW at a wind speed of 10 m/s, offering application prospects for the power supply of low-power electronic devices. This work can serve as a reference for the structural design and theoretical analysis of a flutter-based wind energy harvester.

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Section: Device Structure and Modal Analysismentioning

confidence: 99%

“…where (EI ω ) i , (GI t ) i , (ρI m ) i and α i represent the warping stiffness, the torsional stiffness, the moment of inertial per unit length, and the twist angle of the ith section, respectively. Equation (8) can also be solved by separating variables as [31], where:…”

Section: Device Structure and Modal Analysismentioning

confidence: 99%

A Flutter-Based Electromagnetic Wind Energy Harvester: Theory and Experiments

Wen

et al. 2019

Applied Sciences

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“…Some piezoelectric materials are widely used in MEMS energy harvesters, which are aluminum nitride (AlN) [18,19], zinc oxide (ZnO) [20,21], and Pb(Zr x Ti 1-x )O 3 (PZT) [22,23,24,25,26,27]. Among these, PZT has a higher electromechanical coupling coefficient compared with AlN and ZnO.…”

Section: Introductionmentioning

confidence: 99%

A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism

Huang

Hou

et al. 2019

Micromachines

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This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g−1·Hz−1·cm−3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario.

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“…The determined NPD and BW values performed better than those of previously published studies, making the proposed technology highly promising for the future development of CMOS-compatible piezoelectric harvesters. Such values of NPD are ≈2-10 times higher in comparison to previously published NPD [24][25][26][27][28]. The BW value was also determined for frequencies at FWHM of the spectrum, at a constant of A ≈ 0.5 g and reached a value of ≈2.8 Hz.…”

Section: Resultsmentioning

confidence: 61%

“…The NPD was determined (according to the Equation (2) with an assumption that the effective volume was ≈1.72 × 10 −3 cm 3 ) having a value in a range of ≈2.3 mW• cm −3 •g −2 to ≈1.5 mW•cm −3 •g −2 for A in range of 0.25 g to 2 g (Figure 10b). Such values of NPD are ≈2-10 times higher in comparison to previously published NPD [24][25][26][27][28]. The BW value was also determined for frequencies at FWHM of the spectrum, at a constant of A ≈0.5 g and reached a value of ≈2.8 Hz.…”

Section: Vibrational Characterizationmentioning

confidence: 62%

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

et al. 2020

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In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 ± 0.08) pC∙N−1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of ≈330 °C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters.

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A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering

Cited by 33 publications

References 26 publications

A Flutter-Based Electromagnetic Wind Energy Harvester: Theory and Experiments

A Flutter-Based Electromagnetic Wind Energy Harvester: Theory and Experiments

A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

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