A micro-aperture electrostatic field mill based on MEMS technology

Horenstein, Mark N.; Stone, Patrick R.

doi:10.1016/s0304-3886(01)00048-1

Cited by 81 publications

(46 citation statements)

References 10 publications

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“…Consequently, sensors that can accurately detect and quantify electrostatic fields in natural and artificial environments are in demand. Various sensors that can measure electrostatic fields have been developed, and most of them can be classified into four categories, namely, double probes [6], field mills [1,7], optical sensors [8][9][10], and micromachined electric field sensors (MEFSs) [11][12][13][14][15][16][17][18][19][20]. Double probes and field mills are fabricated through traditional machining methods; as a result, they possess large volumes and complex structures and entail high power costs.…”

Section: Introductionmentioning

confidence: 99%

Single-chip 3D electric field microsensor

et al. 2017

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This paper presents a single-chip 3D electric field microsensor, in which a sensing element is set at the center to detect the Z-axis component of an electrostatic field. Two pairs of sensing elements with the same structure are arranged in a cross-like configuration to measure the X-and Y-axis electrostatic field components. An in-plane rotary mechanism is used in the microsensor to detect the X-, Y-, and Z-axis electrostatic field components simultaneously. The proposed microsensor is compact and presents high integration. The microsensor is fabricated through a MetalMUMPS process. Experimental results show that in the range of 0-50 kV/m, the linearity errors of the microsensor are within 5.5%, and the total measurement errors of the three electrostatic field components are less than 14.04%.

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Section: Introductionmentioning

confidence: 99%

Single-chip 3D electric field microsensor

et al. 2017

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“…Rotating electric field mills are commonly used for dc field measurements, however, they are expensive and require frequent maintenance. MEMS field mills have been explored as solutions [5][6][7]. However, their shielding shutter is affected by high fields, leading to incorrect measurements.…”

Section: Introductionmentioning

confidence: 99%

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Liyanage

Shafai

Chen

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:A MEMS electric field sensor is presented with wide measurement resolution and adjustable sensitivity. The sense membrane is mounted using torsional springs and employs opposite biased electrodes on its surface, causing rotation in presence of an electric field, enabling operation without reference ground. Control of electrode bias enables adjustable linear measurement range from V/m to MV/m. Compared to earlier works with vertical moving sense membranes, higher sensitivity is achieved for the same bias voltage. Employing on-board electronics to enable independent resonant operation, a noise limited resolution of 3 V/m was achieved.

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“…Electrostatic field measurement has been the subject of much research over the past half century [1]. So far several MEMS-based electrostatic field sensors (EFS) have been suggested [2][3][4] due to their low cost and power dissipation compared with conventional mechanical ones.…”

Section: Introductionmentioning

confidence: 99%

“…1; vi, vo are input node voltage and output node voltage respectively; The AC input cur ent iin flows apart, generating il and i2; gmi and roi denote the transconductance and output resistance of Mi (i=1,2... 8); the body effect of MI, M2, M3 and M4 are ignored for simplicity. rol cascode impedance is sensitive to the quiescent current IQ, (1) this gain is not stable. Figure 3 shows that IQ changes sharply with temperature.…”

Section: Introductionmentioning

confidence: 99%

Efficient CMOS Preamplifier Dedicated for a MEMS-Based Electrostatic Field Sensor

Cui

Yang

Xia

2006

2006 5th IEEE Conference on Sensors

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This paper presents a preamplifier for the MEMSbased electrostatic field sensor (EFS). Being different from the conventional way of using an operational amplifier with a feedback resistor, this preamplifier takes advantage of the cascode structure to realize current to voltage conversion more efficiently. With its main conversion part containing only eight transistors, this preamplifier can realize a transimpedance as high as 109. To improve the temperature performance and stabilize the output DC level, biasing circuit and feedback network are developed. Theoretical calculation is done to give a thorough understanding of the circuit, which meanwhile reveals that the transimpedance is equal to the output cascode impedance. Moreover, the band pass filter profile of this circuit makes it especially suitable for the EFS. The simulation result in Spectre using standard CMOS technology is obtained to confirm the theory I.

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A micro-aperture electrostatic field mill based on MEMS technology

Cited by 81 publications

References 10 publications

Single-chip 3D electric field microsensor

Single-chip 3D electric field microsensor

Torsional Moving Electric Field Sensor with Modulated Sensitivity and without Reference Ground

Efficient CMOS Preamplifier Dedicated for a MEMS-Based Electrostatic Field Sensor

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