A method to reduce losses in buried electrodes RF SAW resonators

Solal, M.; Gratier, Julien; Aigner, Robert; Gamble, Kevin J.; Abbott, B. P.; Kook, T.; Chen, A.; Steiner, K. G.

doi:10.1109/ultsym.2011.0078

Cited by 32 publications

(11 citation statements)

References 13 publications

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“…But since SAW filters are primarily composed of one-port resonators and other resonant building blocks, the skirt steepness is strongly dependent on their quality factor. Thus, measures have been taken to improve the wave guidance in a longitudinal direction and to reduce leakage and scattering losses in the bulk of the substrate, successfully reducing energy losses [3], [4]- [6].…”

Section: Improved Filter Performancementioning

confidence: 99%

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A Bright Outlook for Acoustic Filtering: A New Generation of Very Low-Profile SAW, TC SAW, and BAW Devices for Module Integration

et al. 2015

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F ew technologies have achieved such worldwide success as mobile communications technology has over the last several decades. Mobile wireless communication is still evolving at a fast pace and continues to create new possibilities for daily application. As demand for more energy-efficient and faster mobile computing power grows, so does the need for transmission at high data rates, driven by users' eager acceptance of streaming high-definition video and other innovations. To cope with the demand for bandwidth, more new frequency bands have been released for mobile communications, or have been freed from other applications like analog television, and devoted to this new purpose. In addition, more effective transmission standards have been adopted, such as the state-of-the-art long-term evolution (LTE) and LTE-Advanced.

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Section: Improved Filter Performancementioning

confidence: 99%

“…The creation of a transversal confinement of the resonator supporting a SAW piston mode is very effective [4]- [6]. A piston mode resonator can be achieved with several methods.…”

Section: Improved Filter Performancementioning

confidence: 99%

A Bright Outlook for Acoustic Filtering: A New Generation of Very Low-Profile SAW, TC SAW, and BAW Devices for Module Integration

et al. 2015

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“…[8][9][10][11][12] In SAW devices, one of the most important design challenges is the suppression of transverse mode resonances. Various suppression techniques [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28] have been proposed such as selective removal of SiO 2 , [17][18][19][20][21][22] bending resonator structure, 23) and piston mode design. [24][25][26][27][28] For the piston mode operation, phase shifters such as hammer head and metal dots are placed on electrodes near the aperture edges of interdigital transducer (IDT).…”

Section: Introductionmentioning

confidence: 99%

“…Various suppression techniques [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28] have been proposed such as selective removal of SiO 2 , [17][18][19][20][21][22] bending resonator structure, 23) and piston mode design. [24][25][26][27][28] For the piston mode operation, phase shifters such as hammer head and metal dots are placed on electrodes near the aperture edges of interdigital transducer (IDT). When the SiO 2 top surface is flattened, metals are not necessary to place directly on the electrodes but on the SiO 2 top surface.…”

Section: Introductionmentioning

confidence: 99%

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO₂/LiNbO₃ structure

Gong

Wong

et al. 2022

Jpn. J. Appl. Phys.

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This paper discusses influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated (TC) surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement are considered from IDT aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.

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“…Recently, the authors also indicated that the coupling between two SAWs gives significant impacts on their lateral propagation, too. 16) For example, it was shown that the piston mode operation (PMO) [17][18][19][20][21][22] is possible without giving phase shifters at electrode edges (see Fig. 1) when two SAW modes are coupled.…”

Section: Introductionmentioning

confidence: 99%

Model parameter extraction of lateral propagating surface acoustic waves with coupling on SiO₂/grating/LiNbO₃structure

Zhang

Han

Huang

et al. 2018

Jpn. J. Appl. Phys.

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This paper investigates how lateral propagation of Rayleigh and shear horizontal (SH) surface acoustic waves (SAWs) changes with rotation angle θ and SiO 2 and electrode thicknesses, h SiO2 and h Cu , respectively. The extended thin plate model is used for purpose. First, the extraction method is presented for determining parameters appearing in the extended thin plate model. Then, the model parameters are expressed in polynomials in terms of h SiO2 , h Cu , and θ. Finally, a piston mode structure without phase shifters is designed using the extracted parameters. The possible piston mode structures can be searched automatically by use of the polynomial expression. The resonance characteristics are analyzed by both the extended thin plate model and three-dimensional (3D) finite element method (FEM). Agreement between the results of both methods confirms validity and effectiveness of the parameter extraction process and the design technique.

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A method to reduce losses in buried electrodes RF SAW resonators

Cited by 32 publications

References 13 publications

A Bright Outlook for Acoustic Filtering: A New Generation of Very Low-Profile SAW, TC SAW, and BAW Devices for Module Integration

A Bright Outlook for Acoustic Filtering: A New Generation of Very Low-Profile SAW, TC SAW, and BAW Devices for Module Integration

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO₂/LiNbO₃ structure

Model parameter extraction of lateral propagating surface acoustic waves with coupling on SiO₂/grating/LiNbO₃structure

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A method to reduce losses in buried electrodes RF SAW resonators

Cited by 32 publications

References 13 publications

A Bright Outlook for Acoustic Filtering: A New Generation of Very Low-Profile SAW, TC SAW, and BAW Devices for Module Integration

A Bright Outlook for Acoustic Filtering: A New Generation of Very Low-Profile SAW, TC SAW, and BAW Devices for Module Integration

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure

Model parameter extraction of lateral propagating surface acoustic waves with coupling on SiO2/grating/LiNbO3structure

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Product

Resources

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Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO₂/LiNbO₃ structure

Model parameter extraction of lateral propagating surface acoustic waves with coupling on SiO₂/grating/LiNbO₃structure