2021
DOI: 10.1108/sr-09-2019-0222
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A method to improve tracking ability of drive control of MEMS gyroscopes

Abstract: Purpose A high-precision gyroscope is an important tool for accurate positioning, and the amplitude stability and frequency tracking ability of the drive control system are important and necessary conditions to ensure the precision of micro-electro-mechanical systems (MEMS) gyroscopes. To improve the precision of MEMS gyroscopes, this paper proposes a method to improve the amplitude stability and frequency tracking ability of a drive control system. Design/methodology/approach A frequency tracking loop and a… Show more

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