Abstract:In this paper, a practice of design of experiments and data analysis for 28nm technology NMOS devices was introduced. Optimal design with I-optimality criterion was used for 5 input variables with 3 levels for each device, where total 23 runs/wafers were generated. Based on the response surface models by an excellent regression on device parametric data, both automatic maximum desirability analyses by JMP software and engineering knowledgebased analysis were carried out. The two methods generated similar predi… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.