2013
DOI: 10.1016/j.surfcoat.2013.10.012
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A method for uniformly coating powdery substrates by magnetron sputtering

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Cited by 24 publications
(12 citation statements)
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“…In order to decrease the critical diffusion temperature, the glass permeability has to be further optimized. With this method, random close packing of up to f = 0.765 can be reached [60], however, not higher than given in Eqn (3.14). A comparison is given in Figure 9.…”
Section: Further Increasing Storage Densitiesmentioning
confidence: 79%
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“…In order to decrease the critical diffusion temperature, the glass permeability has to be further optimized. With this method, random close packing of up to f = 0.765 can be reached [60], however, not higher than given in Eqn (3.14). A comparison is given in Figure 9.…”
Section: Further Increasing Storage Densitiesmentioning
confidence: 79%
“…After that, the spheres were coated by magnetron sputtering [60] with TiO 2 , Pt and Ru at different film thicknesses. A detailed discussion of the coating of catalytic films will not be presented at this point, but film thicknesses and material are given in Figure 11, showing an overview of some results.…”
Section: Selected Experimentsmentioning
confidence: 99%
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“…Abe and co-workers have also published details of a drum-based system for RF sputtering of e.g., Pt coatings onto small charges (2g) of silica particles [20,21], and Poelman, et al describe a rotating drum for depositing vanadia-based catalysts for the oxidative dehydrogenation of propane [22]. Schmid has published several papers on the use of angled rotating cups positioned under magnetrons, particularly for coating glass microspheres with refractory metals [23,24]. Yu, et al also use an ultrasonic vibration generator in a similar manner to tumble fly-ash cenosphere particles during the deposition of titania [25].…”
Section: Introductionmentioning
confidence: 99%