The real-time mass spectra of gas-phase species, produced In a graphite furnace containing beryllium analyte and a magnesium modifier, are obtained and used to elucidate mechanisms that control vaporization, atomization, and stabilization. It Is determined that free beryllium Is produced from the thermal decomposition of adsorbed monomeric oxide. Beryllium Is lost as polymeric oxides, carbides, cyanide, and cyanamlde during the atomization phase. Stabilization occurs by dehydration of the dlhydroxlde, a mechanism that Is Identical with that responsible for stabilization of aluminum. Comparisons are made with mechanisms associated with atomization of aluminum.