2008
DOI: 10.1007/s11801-008-7058-s
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A method for calculating the center position of collimated light

Abstract: It is a key problem to accurately calculate beam spots' center of measuring the warp by using a collimated laser. A new method, named double geometrical center method (DGCM), is put forward for the first time. In this method, a plane wave perpendicularly irradiates an aperture stop, and a charge couple device (CCD) is employed to receive the diffraction-beam spots, then the geometrical centers of the first and the second diffraction-beam spots are calculated respectively, and their mean value is regarded as th… Show more

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