A Method for 3 Dimensional Structural and Compositional Imaging of Nano-materials

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

3D Elemental Mapping Using a Dedicated STEM Equipped with a Real-Time EELS Imaging System

“…In this method, a specially designed FIB-STEM compatible specimen rotation holder was used throughout specimen preparation, observation and analyses. The specimen holder allows 360 degree rotation and ±20 degree tilting of a specimen even in a narrow-gapped, high resolution pole-piece [2]. Since the specimen can be rotated a complete 360 degrees, the specimen has an unobstructed view of the incident electron beam, detectors and spectrometers over the full rotation range.…”