A MEMS Resonant Differential Pressure Sensor With High Accuracy by Integrated Temperature Sensor and Static Pressure Sensor

Cheng, Chao; Yao, Jiahui; Han, Xue; Lu, Yulan; Wang, Junbo; Chen, Deyong; Chen, Jian

doi:10.1109/led.2022.3211886

Cited by 17 publications

(4 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this proposed sensor model, the sensor sensitivity parameters like the highest deflection expressed in (7), the highest bending moments obtained about the horizontal and vertical axes in (9), and the highest stress in (10) induced in different structural configurations of the diaphragm are clarified. Considering all these above equations, it is described clearly that the deflection produced in the diaphragm is dependent directly on the applied pressure, and side length and with the decrease in aspect ratio, diaphragm deflection increases.…”

Section: Parametric Studymentioning

confidence: 99%

“…Some remarkable approaches towards linearity with temperature variation were also portrayed by resistive pressure sensors via silicon diaphragm in the literature [6][7][8]. Cheng et al developed a MEMS-based resonant pressure micro-sensor for measuring temperature, and static pressure more precisely [9]. Han et al efficiently achieved on-chip thermal compensation in a quartz crystal MEMS pressure sensor with a double-ended tuning fork (DETF) resonator [10].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Improved Sensitivity of MEMS-based Piezoresistive Pressure Sensor using Silicon Nitride Diaphragm

Das,

Dutta

2024

JICS

View full text Add to dashboard Cite

In this paper, Piezoresistive Pressure Sensor (PPS) with four Polysilicon piezoresistors on Si3N4 diaphragm with improved sensitivity is successfully designed by using MEMS technology. Sensing is accomplished via deposited polysilicon resistors like metal resistors. The analytical model of PPS is optimized for location and geometry of the piezoresistors and the sensors based on different aspect ratios (both square and rectangular) have been investigated. The performance parameters like maximum deflection, maximum induced stress on the diaphragm have been compared using ANSYS and MATLAB simulation programming based on mathematical model. By interpreting the proper selection of the geometry of a thin Si3N4 diaphragm, the maximum deflection, maximum induced stress and highest sensitivity for this sensor are obtained for the diaphragm when aspect ratio is minimum. It has been found that sensitivity of the sensor is achieved when the piezoresistors are symmetrically placed at 65 m from the edges of the diaphragm. The analysis describes that the sensor based on square diaphragm is more sensitive than the rectangular one. It is influenced more powerfully by diaphragm thickness. The applied pressure range is considered from 0.5 kPa to 40 kPa. From the simulation results, the shape and the sensor design can be optimized for a highly sensitive PPS.

show abstract

Section: Parametric Studymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Improved Sensitivity of MEMS-based Piezoresistive Pressure Sensor using Silicon Nitride Diaphragm

Das,

Dutta

2024

JICS

View full text Add to dashboard Cite

show abstract

“…The strain change due to the deformation can be measured by piezo-resistively * Author to whom any correspondence should be addressed. [3,4,[6][7][8], capacitively [9][10][11][12][13], optically [14][15][16] or by measuring the change in resonance frequency of a resonator fabricated on the diaphragm [5,17,18]. The piezoresistive and capacitive transduction schemes offer excellent responsivities over a short linear range [7,10].…”

Section: Introductionmentioning

confidence: 99%

“…Since the first demonstration of a resonant pressure sensor with a silicon resonator the responsivities of the resonant pressure sensor have not improved significantly. Typical responsivities of silicon resonator-based resonant pressure sensors are in the range of a few 100 Hz kPa −1 [17][18][19][20][21]. Since the resonance frequency is proportional resonator's Young's modulus, the simplest way to improve responsivity is to use a high Young's modulus material for the resonator.…”

Section: Introductionmentioning

confidence: 99%

Graphene resonant pressure sensor with ultrahigh responsivity-range product

More,

Naik

2024

J. Micromech. Microeng.

View full text Add to dashboard Cite

Graphene has good mechanical properties including large Young's modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene-based sensors has been limited due to difficulties in fabrication, encapsulation, and packaging. Here, we report a graphene nanoresonator-based resonant pressure sensor. The graphene nano resonator is fabricated on a thin silicon diaphragm that deforms due to pressure differential across it. The deformation-induced strain change results in a resonance frequency shift of the graphene nano resonator. The pressure sensing experiments demonstrate a record high responsivity of 20 kHz/kPa over a range of 270 kPa. The design has the potential to reach responsivities up to 500 kHz/kPa. The reported responsivity is two orders of magnitude higher than the silicon-based resonant pressure sensors. The estimated resolution of pressure sensing is 90 Pa, which is 0.03% of the full-scale range of the pressure sensor. This exceptional performance is attributed to two factors: maintaining a high-quality vacuum environment for the nanoresonator and introducing stimuli through a thin silicon diaphragm. The proposed pressure sensor design provides flexibility to adjust responsivity, range and footprint as needed. The fabrication method is simple and has the potential to be integrated into the modern semiconductor foundries.

show abstract

Development of a new MEMS resonant differential pressure sensor with high accuracy and high stability

Cheng,

Lu,

Yao

et al. 2024

Measurement

View full text Add to dashboard Cite

A MEMS Resonant Differential Pressure Sensor With High Accuracy by Integrated Temperature Sensor and Static Pressure Sensor

Cited by 17 publications

References 21 publications

Improved Sensitivity of MEMS-based Piezoresistive Pressure Sensor using Silicon Nitride Diaphragm

Improved Sensitivity of MEMS-based Piezoresistive Pressure Sensor using Silicon Nitride Diaphragm

Graphene resonant pressure sensor with ultrahigh responsivity-range product

Development of a new MEMS resonant differential pressure sensor with high accuracy and high stability

Contact Info

Product

Resources

About