A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure

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A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure

Cited by 5 publications

References 36 publications

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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

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