A mems electromagnetic optical scanner for a commercial confocal laser scanning microscope

Matsubara, Hiroshi; Asaoka, N.; Isokawa, T.; Ogata, Masaru; Aoki, Yuriko; Imai, M.; Fujimori, O.; Katashiro, M.; Matsumoto, Kazuya

doi:10.1109/jmems.2003.809961

Cited by 117 publications

(60 citation statements)

References 6 publications

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“…Their versatility further allows operation at resonance to achieve high-speed raster scanning, which is necessary for real-time en face imaging. Various MEMS scanning mirrors have been developed for beam steering in confocal microscopy [9][10][11][12][13][14], OCT [15][16][17][18][19][20][21], and two-photon microscopy [22]. In these micromirrors, 2D scanning motions can derive from thermoelectric, electrostatic, electromagnetic, or piezoelectric actuation, and the microfabrication adaptability of MEMS devices facilitates integration of additional functionality such as adjustable-focal-length scanning micromirrors [23] or dynamic aberration correction [24].…”

Section: Introductionmentioning

confidence: 99%

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Lin

Keeler

2015

Micromachines

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Microelectromechanical systems (MEMS) have an unmatched ability to incorporate numerous functionalities into ultra-compact devices, and due to their versatility and miniaturization, MEMS have become an important cornerstone in biomedical and endoscopic imaging research. To incorporate MEMS into such applications, it is critical to understand underlying architectures involving choices in actuation mechanism, including the more common electrothermal, electrostatic, electromagnetic, and piezoelectric approaches, reviewed in this paper. Each has benefits and tradeoffs and is better suited for particular applications or imaging schemes due to achievable scan ranges, power requirements, speed, and size. Many of these characteristics are fabrication-process dependent, and this paper discusses various fabrication flows developed to integrate additional optical functionality beyond simple lateral scanning, enabling dynamic control of the focus or mirror surface. Out of this provided MEMS flexibility arises some challenges when obtaining high resolution images: due to scanning non-linearities, calibration of MEMS scanners may become critical, and inherent image artifacts or distortions during scanning can degrade image quality. Several reviewed methods and algorithms have been proposed to address these complications from MEMS scanning. Given their impact and promise, great effort and progress have been made toward integrating MEMS and biomedical imaging.

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Section: Introductionmentioning

confidence: 99%

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Lin

Keeler

2015

Micromachines

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“…Miniature scanner technologies have been employed in 1) scanning confocal microscopy, a powerful optical imaging method that can achieve sub-cellular resolution in real time [1][2][3][4], 2) portable, lightweight, low-power, inexpensive projection video displays with high information content [5][6][7][8][9], and 3) near-eye virtual displays like head-mounted displays (HMD) [10][11][12][13][14]. Most miniature scanner technologies utilize MEMS scanner mirrors.…”

Section: Introductionmentioning

confidence: 99%

2D MEMS electrostatic cantilever waveguide scanner for potential image display application

Lin

Wang

2015

MATEC Web of Conferences

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Abstract. This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width) to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm) with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input). A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5mm beam diameter is observed at the focal plane. The transmission efficiency is low (~10%) and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

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“…The optical microelectromechanical system (MOEMS) scanner is one of the core components in many interesting fields as laser imaging, information handling, factory automation, printing, graphic arts, image digitizing, quality inspection, barcode reading, data storage, precision pattern generation, display, surveillance, and medical imaging (Duncan et al 2002;Hornbeck 1989;Khechana et al 2005;Miyajima et al 2003;Motamedi 2005). It usually determines the device's limitation and performance.…”

Section: Introductionmentioning

confidence: 99%

“…A biaxial micromirror used in an optical coherence tomography (OCT) system to acquire 3-D images has already been demonstrated (Yeow et al 2005). In addition, the micromirror actuating mechanisms such as electrostatic, thermal (Jain et al 2004;Singh et al 2005), piezoelectric (Kawabata et al 1997;Yee et al 2000), electromagnetic (Miyajima et al 2003), electrowetting of liquid metals (Zeng et al 2005), or mixed actuators are the subjects of intense research. During the actuator design process, performance such as static and dynamic characteristics of the scanner should be modeled, simulated, and understood (Zhang et al 2001;Zhao et al 2005).…”

Section: Introductionmentioning

confidence: 99%

A Characteristic Study of Micromirror with Sidewall Electrodes

Bai

Yeow

Wilson

2007

International Journal of Optomechatronics

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A study of the characteristics of a micromirror with sidewall electrodes is presented. The static and dynamic performance of a micromirror with the addition of sidewall electrodes is improved over that of a micromirror with only bottom electrodes. The linear voltageto-angle property is still maintained under differential drive method and the drive voltage to achieve the same angular displacement is greatly reduced. The pull-in voltage is not changed significantly. In addition, our model demonstrates that undesired spring-softening effect that is commonly found in electrostatic actuation is significantly reduced. Analyses are based on both analytical model and FEM simulation.

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A mems electromagnetic optical scanner for a commercial confocal laser scanning microscope

Cited by 117 publications

References 6 publications

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

Progress of MEMS Scanning Micromirrors for Optical Bio-Imaging

2D MEMS electrostatic cantilever waveguide scanner for potential image display application

A Characteristic Study of Micromirror with Sidewall Electrodes

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