A MEMS conical spring actuator array

Fukushige, Takashi; Hata, Seiichi; Shimokohbe, Akira

doi:10.1109/jmems.2004.839345

Cited by 78 publications

(50 citation statements)

References 29 publications

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“…However, it generally causes a significant charging phenomenon that greatly deteriorates the performance and reliability of the electrostatic actuators [23,24]. The phenomenon and its repression have often been discussed [25][26][27]. To repress the negative effects of charging, suitable driving signals must be determined.…”

Section: Introductionmentioning

confidence: 99%

Driving Voltage Reduction of a Micromechanical Optical Switch Driven by Electrostatic Force Using an S-Shaped Deformable Thin-Film Mirror

Sato

2013

JAMDSM

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This paper describes the driving voltage reduction of an optical switch that has an S-shaped deformable thin-film mirror driven by an electrostatic force. The prototype optical switch has high-dielectric-constant layers made from Ta 2 O 5 for a low applied voltage to generate a sufficiently large attractive force. Although the dielectric layers are effective at increasing the attractive force, they often cause a charging problem. Thus, suitable driving procedures for solving the charging problem were experimentally examined. In the two driving procedures, AC or DC voltage inputs were used. The experimental results indicate that the driving procedures are effective at reducing the driving voltage to 30 V. However, the results also show that the AC components induce a residual vibration of the spot position. Consequently, the driving procedure with the DC voltage input is proven to be more suitable.

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Section: Introductionmentioning

confidence: 99%

Driving Voltage Reduction of a Micromechanical Optical Switch Driven by Electrostatic Force Using an S-Shaped Deformable Thin-Film Mirror

Sato

2013

JAMDSM

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“…Ionic Conducting Polymer Gel Film (ICPF) actuator array (6) , and nano-micro technology aided static electric actuator arrays (7) . Since distributed pressure must be applied to the human skin to stimulate human tactile receptors distributed over it, very high-level actuator technology is required to realize high-density distributed actuator arrays.…”

Section: Introductionmentioning

confidence: 99%

Presentation Capability of Compound Displays for Pressure and Force

Ohka

Kato

Fujiwara

et al. 2008

JAMDSM

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The authors developed advanced haptic displays capable of stimulating the muscles and tendons of the forearms and tactile receptors in fingers to investigate tactile and force effects on simultaneous presentation. Display A is comprised of a master hand with two sets of tactile display with a 4-by-6 array of stimulus pins driven by micro-actuators and an articulated manipulator. Display B is comprised of an articulated manipulator and an 8-by-8 array type tactile display developed in a previous paper. A series of experiments was performed using the above A and B displays to verify the presentation capability of this display type. In Experiment I, subjects grasped virtual pegs and judged their diameters. In Experiment II, subjects tried to insert the pegs into holes. In Experiment III, the crossed-angle of a comparison texture was adjusted to bring it as close as possible to the standard texture fixed during experiments. Since diameter discrimination and insertion precision of the virtual peg were increased by tactile information, tactile-force presentation was effective for peg-in-hole for relatively large clearance. On the other hand, recognition capability for virtual texture was not enhanced compared to a mouse-mounted tactile display previously developed. While the pressure display is effective for instant of touch and peg rotation representations, rotation tactile imaging is not always effective for texture recognitions.

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“…This has triggered the recent development of novel types of micro-and nano-electromechanical (MEMS/NEMS) devices based on MGs, such as cantilevers [16], spring actuators [17] or hinges [18]. This trend towards miniaturization has prompted the development of new techniques to characterize the different properties of materials.…”

Section: Introductionmentioning

confidence: 99%