A MEMS-based pneumatic micro-conveyor for planar micromanipulation

Yahiaoui, Riad; Zeggari, Rabah; Malapert, Julien; Manceau, Jean-François

doi:10.1016/j.mechatronics.2011.04.005

Cited by 26 publications

(39 citation statements)

References 19 publications

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“…Recently, Yahiaoui et al [54,55] proposed a microconveyor concept and its implementation. The microconveyor is a 9 × 9 mm 2 surface able to move millimetersized planar objects in the four cardinal directions using air flows.…”

Section: Tilted Air-jet Manipulatorsmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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Many manipulation systems using air flow have been proposed for object handling in a non-prehensile way and without solid-to-solid contact. Potential applications include high-speed transport of fragile and clean products and high-resolution positioning of thin delicate objects. This paper discusses a comprehensive survey of state-of-the-art pneumatic manipulation from the macro scale to the micro scale. The working principles and actuation methods of previously developed air-bearing surfaces, ultra-sonic bearing surfaces, air-flow manipulators, air-film manipulators, and tilted air-jet manipulators are reviewed with a particular emphasis on the modeling and the control issues. The performance of the previously developed devices are compared quantitatively and open problems in pneumatic manipulation are discussed.

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Section: Tilted Air-jet Manipulatorsmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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“…A micro-conveyor has four nozzles able to generate inclined air-jets in the four cardinal directions. An object of small weight and small dimensions, can be conveyed to a desired position with intermittent air-flow pulses of a pre-adjustable pressure up to 20 kPa [13]. The used experimental object is a disk of 3.5 millimetres diameter and 12 milligrams weight.…”

Section: Experiments With a Smart-surfacementioning

confidence: 99%

“…To test the performance of this kind of sensor for microrobotics, we’ve made a comparative analysis between a precise but slow video camera and a custom-made fast PSD system applied to the tracking of a diffuse-reflectivity object transported by a microconveyor called Smart-Surface. The Smart-Surface micro-robotic application which has been designed by the team of Yahiaoui et al [12,13] at the MN2S department of the FEMTO-ST Institute, France, is a micro-manipulation unit for transporting various small planar objects using air levitation. The principle of objects conveyance supposes cardinally oriented inclined air jets.…”

Section: Introductionmentioning

confidence: 99%

“…The sensorial system used in [13] was a video camera capable of up to 60 frames per second (fps). Provided the fast Smart-Surface dynamics like travel times from border to border was under 100 ms as well as the Firewire 1394 camera bus delay of 15 ms, it was considered as appropriate to upgrade the existing system with a fast PSD by means of an optical beam splitter.…”

Section: Introductionmentioning

confidence: 99%

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High Dynamics and Precision Optical Measurement Using a Position Sensitive Detector (PSD) in Reflection-Mode: Application to 2D Object Tracking over a Smart Surface

Ivan

Ardeleanu

Laurent

2012

Sensors

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When related to a single and good contrast object or a laser spot, position sensing, or sensitive, detectors (PSDs) have a series of advantages over the classical camera sensors, including a good positioning accuracy for a fast response time and very simple signal conditioning circuits. To test the performance of this kind of sensor for microrobotics, we have made a comparative analysis between a precise but slow video camera and a custom-made fast PSD system applied to the tracking of a diffuse-reflectivity object transported by a pneumatic microconveyor called Smart-Surface. Until now, the fast system dynamics prevented the full control of the smart surface by visual servoing, unless using a very expensive high frame rate camera. We have built and tested a custom and low cost PSD-based embedded circuit, optically connected with a camera to a single objective by means of a beam splitter. A stroboscopic light source enhanced the resolution. The obtained results showed a good linearity and a fast (over 500 frames per second) response time which will enable future closed-loop control by using PSD.

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“…In a previous paper, Yahiaoui et al proposed a micro-conveyor concept and its implementation which may be useful for the manipulation of small planar objects [12]. The micro-conveyor consists of a stack of three layers, two silicon wafers and a lower Pyrex glass wafer.…”

Section: Introductionmentioning

confidence: 99%

Micropositioning and Fast Transport Using a Contactless Micro-Conveyor

et al. 2014

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Abstract:The micro-conveyor is a 9 × 9 mm 2 manipulation surface able to move millimeter-sized planar objects in the four cardinal directions using air flows. Thanks to a specific design, the air flow comes through a network of micro-channels connected to an array of micro-nozzles. Thus, the micro-conveyor generates an array of tilted air jets that lifts and moves the object in the required direction. In this paper, we characterize the device for transport and positioning tasks and evaluate its performances in terms of speed, resolution and repeatability. We show that the micro-conveyor is able to move the object with a speed up to 137 mm · s −1 in less than 100 ms whereas the positioning repeatability is around 17.7 µm with feedback control. The smallest step the object can do is 0.3 µm (positioning resolution). Moreover, we estimated thanks to a dynamic model that the speed could reach 456 mm · s −1 if several micro-conveyors were used to form a conveying line.

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A MEMS-based pneumatic micro-conveyor for planar micromanipulation

Cited by 26 publications

References 19 publications

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

High Dynamics and Precision Optical Measurement Using a Position Sensitive Detector (PSD) in Reflection-Mode: Application to 2D Object Tracking over a Smart Surface

Micropositioning and Fast Transport Using a Contactless Micro-Conveyor

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