A MEMS-Based Electric Field Sensor for Measurement of High-Voltage DC Synthetic Fields in Air

Ma, Qiang; Huang, Kun; Yu, Zhanqing; Wang, Zheyao

doi:10.1109/jsen.2017.2762327

Cited by 28 publications

(15 citation statements)

References 48 publications

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“…To verify the function of the EFS and calibrate the coefficient of λ , we designed the measurement system shown in Figure 7 . The structure of the parallel-plate ion flow generator was originally proposed by Withers et al [ 25 ], and the equipment described in Ref. [ 25 ] ( Figure 7 ) was used in the present work.…”

Section: Calibration and Measurement In An Electric Ion Flow Fieldmentioning

confidence: 99%

“…Due to the distortion of the electric field, demarcating and calibrating the EFS is difficult, and measurements without demarcation and calibration processes are meaningless. A small part of the EFS is calibrated in an electric field [ 25 ]. Although the authors of Ref.…”

Section: Calibration and Measurement In An Electric Ion Flow Fieldmentioning

confidence: 99%

“…Although the authors of Ref. [ 25 ] used a parallel-plate ion current generator to calibrate their EFS, the value measured by the field mill on the ground was not equal to the original value of the space synthetic electric field. The authors of a previous study [ 26 ] proposed a method for artificially manufacturing an electric ion flow field, which is the approach recommended by IEEE for DC ion flow field measurements and calibration, and a calibration method for an electric field in space.…”

Section: Calibration and Measurement In An Electric Ion Flow Fieldmentioning

confidence: 99%

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Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Mou

Huang

et al. 2018

Sensors

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Thus far, despite the development of electric field sensors (EFSs) such as field mills, optoelectronic EFSs and microelectromechanical system (MEMS)-based EFSs, no sensor can accurately measure an electric field in space due to the existence of space charge and the influence of charge attachment. To measure a spatial synthetic electric field in an ion flow field, a double potential independent differential EFS based on MEMS is proposed. Compared with other EFSs, this method has the advantages of independent potential (without grounding) and the ability to support the measurement of the synthetic ion flow electric field in space. First, to analyse the charge distribution after the sensor is involved exposed to an electric field, a simulation model was constructed. Then, given the redistribution of the spatial electric field in space and the influence of the surface charge on the sensor, the quantitative relationship between the electric field to be measured and that measured by the proposed sensor was obtained. To improve the performance of the EFS, a set of synthetic field strength sensor calibration systems that consider spatial ion flow injection was established. Furthermore, the parameter λ, which is related to the relative position of the differential chips, was determined. Finally, a series of comparative experiments indicated that the differential EFS highlighted in the present study exhibits good linearity and accuracy.

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Section: Calibration and Measurement In An Electric Ion Flow Fieldmentioning

confidence: 99%

Section: Calibration and Measurement In An Electric Ion Flow Fieldmentioning

confidence: 99%

Section: Calibration and Measurement In An Electric Ion Flow Fieldmentioning

confidence: 99%

See 1 more Smart Citation

Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Mou

Huang

et al. 2018

Sensors

Self Cite

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show abstract

“…Compared with the simulation method, the direct measuring approach by sensors is effective. All kinds of sensors, such as the rotary voltmetre [6], space rotating DC field columnar probe [7], photoelectric integrated electric field sensor [8], and microelectromechanical systems (MEMS) electric field sensor [9, 10], were or are designed, fabricated, and tested. However, the vast majority of people only care about the performance of the sensor itself, ignoring the relationship between the measuring result and the actual value.…”

Section: Introductionmentioning

confidence: 99%

“…However, the vast majority of people only care about the performance of the sensor itself, ignoring the relationship between the measuring result and the actual value. Only a small part of the literature mentions that the sensor was calibrated in an electrostatic field [9, 11]. Although the literature [9] mentioned ion flow field calibration using a parallel plate ion current generator (PPICG), the value measured by the field mill on the ground is not equal to the electric field strength to be measured.…”

Section: Introductionmentioning

confidence: 99%