A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

Smith, R.; Sparks, D.; Riley, D. S.; Najafi, Nader

doi:10.1109/tie.2008.926703

Cited by 67 publications

(44 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Resonant Coriolis mass flow sensors [1,2] also use frequency to arrive at a mass flow rate. The basic function of an ideal resonating Coriolis mass flow sensor can be expressed by Equation (2).…”

Section: Sensor Output Driftmentioning

confidence: 99%

“…The basic function of an ideal resonating Coriolis mass flow sensor can be expressed by Equation (2). The mass flow rate q is given by:…”

Section: Sensor Output Driftmentioning

confidence: 99%

“…A variety of Micro Electro Mechanical Systems (MEMS) devices have been applied to measuring the flow rate [1,2] density and constituent concentration [3,4] and pressure [5][6][7][8] of gases. While many of these devices have been designed for use in air or oxygen in automotive and medical applications, a number of MEMS sensors have been applied to the measurement of gases such as hydrogen, helium, natural gas, nitrous oxide and others.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Sparks¹,

Mitchell²,

Lee³

2013

JST

View full text Add to dashboard Cite

Exposure of absolute pressure sensors, resonant microtube density, binary concentration sensors and chip-scale vacuum packaged pirani gauges to room temperature helium resulted in a gradual drift in sensor output. No effect was found for differential pressure sensors and pirani gauges vacuum packaged with ceramic or metal packages. The observed results apply to other vacuum packaged MEMS devices such as gyroscopes, voltage controlled oscillators, infrared and Coriolis mass flow sensors. Potential causes for this loss of hermeticity are discussed as well as application limitations for MEMS sensors.

show abstract

Section: Sensor Output Driftmentioning

confidence: 99%

“…The basic function of an ideal resonating Coriolis mass flow sensor can be expressed by Equation (2). The mass flow rate q is given by:…”

Section: Sensor Output Driftmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Sparks¹,

Mitchell²,

Lee³

2013

JST

View full text Add to dashboard Cite

show abstract

“…One year later they developed a capacitive readout for the sensor [2]. In 2001 another micromachined Coriolis mass flow sensor was presented by Smith et al, consisting of a highly doped silicon tube operating in vacuum [3]. In 2008, Haneveld et al presented the first micro Coriolis mass flow sensor based on a silicon nitride tube with an extremely thin tube wall of 1.5 µm [4].…”

Section: Introductionmentioning

confidence: 99%

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Alveringh

Groenesteijn

Wiegerink

et al. 2016

Microelectronic Engineering

View full text Add to dashboard Cite

We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for three times increased sensitivity. Capacitive Coriolis mass flow sensors are normally read out by two electrodes that measure the ratio between the actuation mode and the Coriolis mode, which is induced by the mass flow. This ratio results in a phase shift between the two electrodes. By adding two additional read out electrodes, the actuation mode signal is partially cancelled, allowing for higher sensitivity to the Coriolis mode, and thus larger phase shifts for the same mass flows. An analytical model is derived and correspond with the measurements. It is also proven that the range and sensitivity of the sensor can be tuned by changing the size of the additional readout electrodes. This readout method does not increase the readout time.

show abstract

“…A few years later, another development of a microfabricated Coriolis mass flow sensor started [52][53][54]. The first steps of the fabrication process of this sensor is similar to the work of Enoksson et al The channels are etched in a silicon wafer, the wafer is bonded to another silicon wafer.…”

Section: Coriolis Mass Flow Sensorsmentioning

confidence: 99%

Integrated throughflow mechanical microfluidic sensors

Alveringh¹

View full text Add to dashboard Cite

This dissertation is part of a project that has received funding from the Eurostars-2 joint programme with co-funding from the European Union Horizon 2020 research and innovation programme.The cover shows a resonance peak emerging from the noise 1 floor and dividing a droplet in two parts. Resonance plays an important role in all sensors described by this dissertation for measuring physical quantities of fluids.Cover design by Dennis Alveringh. Printed by Gildeprint,

show abstract

A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications

Cited by 67 publications

References 11 publications

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure

Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning

Integrated throughflow mechanical microfluidic sensors

Contact Info

Product

Resources

About