A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2

Roshan, Meisam Heidarpour; Zaliasl, Samira; Joo, Kimo; Souri, Kamran; Palwai, Rajkumar; Chen, Lijun Will; Singh, Amanpreet; Pamarti, Sudhakar; Miller, Nicholas J.; Doll, Joseph C.; Arft, Carl; Tabatabaei, S.; Sechen, Carl; Partridge, A.; Menon, Vinod M.

doi:10.1109/jssc.2016.2621035

Cited by 45 publications

(12 citation statements)

References 16 publications

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“…The nonlinearity converts amplitude fluctuations into frequency fluctuations, leading to degradations in phase stability 21 . Such nonlinear effects are particularly strong in miniaturized silicon micro- and nanomechanical devices that have become viable candidates to replace bulky quartz resonators commonly used as frequency references 23 . Stabilization of the frequency in the presence of strong nonlinearity has attracted much interest recently.…”

Section: Introductionmentioning

confidence: 99%

Frequency stabilization and noise-induced spectral narrowing in resonators with zero dispersion

et al. 2019

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Mechanical resonators are widely used as precision clocks and sensitive detectors that rely on the stability of their eigenfrequencies. The phase noise is determined by different factors including thermal noise, frequency noise of the resonator and noise in the feedback circuitry. Increasing the vibration amplitude can mitigate some of these effects but the improvements are limited by nonlinearities that are particularly strong for miniaturized micro- and nano-mechanical systems. Here we design a micromechanical resonator with non-monotonic dependence of the eigenfrequency on energy. Near the extremum, where the dispersion of the eigenfrequency is zero, the system regains certain characteristics of a linear resonator, albeit at large amplitudes. The spectral peak undergoes narrowing when the noise intensity is increased. With the resonator serving as the frequency-selecting element in a feedback loop, the phase noise at the extremum amplitude is ~3 times smaller than the minimal noise in the conventional nonlinear regime.

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Section: Introductionmentioning

confidence: 99%

Frequency stabilization and noise-induced spectral narrowing in resonators with zero dispersion

et al. 2019

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“…The last type of UCRB sensors is PS-UCRB sensors [118][119][120]. Resonators of PS-UCRB sensors are separately located in the same environment and will drift in the same or inverse directions in response to changes through appropriate design.…”

Section: Ps-ucrb Sensorsmentioning

confidence: 99%

“…Nowadays, DRB and MRB MEMS sensors have attracted great attention from many researchers due to their advantages. Based on the relationship of resonators, DRB and MRB MEMS sensors can be categorized into three classes which include strength-coupledresonator-based (SCRB) sensors , wave-coupled-resonator-based (WCRB) sensors [109][110][111] and uncoupled-resonator-based (URB) sensors [112][113][114][115][116][117][118][119][120][121][122].…”

Section: Introductionmentioning

confidence: 99%

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

et al. 2021

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Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.

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“…MEMS technologies demonstrate several advantageous features such as miniaturization, batch manufacturability, and close integration with CMOS electronics [1], [5], [6] making MEMS oscillators attractive alternatives to well established quartz-based oscillators for timing and frequency control applications. Additionally, they demonstrate excellent short-term and long-term frequency stability, with temperature sensitivity reduced through the integration of passive [7] and active [8] compensation schemes. The reported performance of MEMS oscillators have improved significantly in recent years, displaying sub-ppb short-term and long-term frequency stabilities A wide variety of structural topologies of MEMS oscillators has been investigated.…”

Section: Introductionmentioning

confidence: 99%

A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability

Parajuli

Sobreviela

Zhang

et al. 2021

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µHz (36 ppt @ 0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely highquality factor of 1.8 * 10 6 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.

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A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2

Cited by 45 publications

References 16 publications

Frequency stabilization and noise-induced spectral narrowing in resonators with zero dispersion

Frequency stabilization and noise-induced spectral narrowing in resonators with zero dispersion

Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability

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