A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine

Alhmoud, Hashim; Brodoceanu, D.; Elnathan, Roey; Kraus, Tobias; Voelcker, Nicolas H.

doi:10.1016/j.pmatsci.2019.100636

Cited by 77 publications

(75 citation statements)

References 214 publications

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“…High‐aspect‐ratio nanostructures are now providing major advantages in precise manipulation of increasingly complex cellular processes, assisting the translation into clinical applications such as tissue engineering, regenerative medicine, drug delivery, biosensing, and cancer immunotherapies. [ 2–5 ] In particular, 1D vertical nanostructures (1D‐VNS)—nanowires, nanoneedles, nanopillars, nanotubes, nanosyringes, nanostraws, nanocones, and nanospikes ( Figure a)—have helped tackle various biological problems such as intracellular recording and genetic interrogation. [ 6–16 ] Unlike other high‐aspect‐ratio nanostructures, such as freestanding carbon nanotubes, 1D‐VNS can be rationally designed and synthesized, via top‐down and/or bottom‐up approaches, with defined key parameters—including topological geometry (pitch, diameter, length), chemical composition, doping, and electronic properties.…”

Section: Introductionmentioning

confidence: 99%

Emerging Roles of 1D Vertical Nanostructures in Orchestrating Immune Cell Functions

Chen

et al. 2020

Advanced Materials

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nanotopographies optimized to facilitate biomolecular delivery, genome editing, and cellular modulation-have enormous potential to build capacity over a range of collaborating disciplines associated with biomedical research. High-aspect-ratio nanostructures are now providing major advantages in precise manipulation of increasingly complex cellular processes, assisting the translation into clinical applications such as tissue engineering, regenerative medicine, drug delivery, biosensing, and cancer immunotherapies. [2-5] In particular, 1D vertical nanostructures (1D-VNS)-nanowires, nanoneedles, nanopillars, nanotubes, nanosyringes, nanostraws, nanocones, and nanospikes (Figure 1a)-have helped tackle various biological problems such as intracellular recording and genetic interrogation. [6-16] Unlike other highaspect-ratio nanostructures, such as freestanding carbon nanotubes, 1D-VNS can be rationally designed and synthesized, via top-down and/or bottom-up approaches, with defined key parameters-including topological geometry (pitch, diameter, length), chemical composition, doping, and electronic propert ies. [17-21] So by well-controlled programming coupled with selective surface functionality, 1D-VNS can provide unprecedented spatial and mechanical resolution to enable direct, Engineered nano-bio cellular interfaces driven by 1D vertical nanostructures (1D-VNS) are set to prompt radical progress in modulating cellular processes at the nanoscale. Here, tuneable cell-VNS interfacial interactions are probed and assessed, highlighting the use of 1D-VNS in immunomodulation, and intracellular delivery into immune cells-both crucial in fundamental and translational biomedical research. With programmable topography and adaptable surface functionalization, 1D-VNS provide unique biophysical and biochemical cues to orchestrate innate and adaptive immunity, both ex vivo and in vivo. The intimate nanoscale cell-VNS interface leads to membrane penetration and cellular deformation, facilitating efficient intracellular delivery of diverse bioactive cargoes into hard-to-transfect immune cells. The unsettled interfacial mechanisms reported to be involved in VNS-mediated intracellular delivery are discussed. By identifying up-to-date progress and fundamental challenges of current 1D-VNS technology in immune-cell manipulation, it is hoped that this report gives timely insights for further advances in developing 1D-VNS as a safe, universal, and highly scalable platform for cell engineering and enrichment in advanced cancer immunotherapy such as chimeric antigen receptor-T therapy.

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Section: Introductionmentioning

confidence: 99%

Emerging Roles of 1D Vertical Nanostructures in Orchestrating Immune Cell Functions

Chen

et al. 2020

Advanced Materials

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“…[169,170] DRIE and photolithography are used to create silicon wafers with uniformly spaced and uniformly dimensioned micro-and nanochannels. [188] Metal-assisted chemical etching (MACE) using nanosphere lithography has been demonstrated as an alternative to DRIE for creating uniform arrays of pores, [189,190] but arrays fabricated with MACE have not yet been combined with porous substrate electroporation. Contrary to porous membrane systems, porous array systems utilize a single pore beneath each cell, and there are more options for substrate modification than porous membranes, which can only primarily adjust pore size, pore density, and surface coating.…”

Section: System Designmentioning

confidence: 99%

High Throughput and Highly Controllable Methods for In Vitro Intracellular Delivery

Brooks

Minnick

Mukherjee

et al. 2020

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“…Various applications utilizing the metal-assisted etching have been proposed so far, from energy conversion and storage 17 (e.g. solar cells, thermoelectric devices, and lithium-ion batteries) to biomedicine 18 (e.g. sensors, tissue engineering, and drug delivery), and it is expected to be used for semiconductor microfabrication.…”

Section: Introductionmentioning

confidence: 99%

“…Metal catalyst plays an essential role for determining the etching behavior. 18,[28][29][30][31][32][33][34][35][36] Recently, Tamarov et al 36 comprehensively studied the etching behavior using various kinds…”

Section: Introductionmentioning

confidence: 99%

Formation and Dissolution of Mesoporous Layer during Metal-Particle-Assisted Etching of n-Type Silicon

et al. 2021

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Metal-assisted etching has attracted increasing attention as a method to produce porous silicon (Si). We previously found that gold (Au)-and platinum (Pt)-particle-assisted etching causes general corrosion of the Si substrate, but not in the case of silver (Ag)-particle-assisted etching [A. Matsumoto, et al., RSC Adv., 10, 253 (2020)]. In this work, we discussed the 2 mechanism of the general corrosion with electrochemical approaches. We demonstrated that potentials of the Au-and Pt-deposited Si during the metal-particle-assisted etching are higher than that of the bare Si in the etchant, but not in the case of the Ag-deposited Si. We also performed electrochemical etching of the bare Si by applying the potential during the Pt-particle-assisted etching, resulting in the formation of a mesoporous layer which was dissolved in the etchant. We concluded that the general corrosion occurs during the metal-particle-assisted etching due to the dissolution of the mesoporous layer formed by anodic polarization of the Si substrate.

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A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine

Cited by 77 publications

References 214 publications

Emerging Roles of 1D Vertical Nanostructures in Orchestrating Immune Cell Functions

Emerging Roles of 1D Vertical Nanostructures in Orchestrating Immune Cell Functions

High Throughput and Highly Controllable Methods for In Vitro Intracellular Delivery

Formation and Dissolution of Mesoporous Layer during Metal-Particle-Assisted Etching of n-Type Silicon

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