2014
DOI: 10.3390/s140509247
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A Low-Power Integrated Humidity CMOS Sensor by Printing-on-Chip Technology

Abstract: A low-power, wide-dynamic-range integrated humidity sensing chip is implemented using a printable polymer sensing material with an on-chip pulse-width-modulation interface circuit. By using the inkjet printing technique, poly(3,4-ethylene-dioxythiophene)/polystyrene sulfonate that has humidity sensing features can be printed onto the top metal layer of a 0.35 μm CMOS IC. The developed printing-on-chip humidity sensor achieves a heterogeneous three dimensional sensor system-on-chip architecture. The humidity se… Show more

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Cited by 10 publications
(4 citation statements)
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“…To improve the poor uniformity of structure, new paper modification approaches based on the papermaking process, such as addition of chemical reagents during the pulping process [142], can be used to produce special functional papers. Finally, hydrophobic patterning and barrier modification approaches will be further developed for integration with paperbased electronic chips [143].…”
Section: Conclusion and Future Perspectivesmentioning
confidence: 99%
“…To improve the poor uniformity of structure, new paper modification approaches based on the papermaking process, such as addition of chemical reagents during the pulping process [142], can be used to produce special functional papers. Finally, hydrophobic patterning and barrier modification approaches will be further developed for integration with paperbased electronic chips [143].…”
Section: Conclusion and Future Perspectivesmentioning
confidence: 99%
“…The response time of PEDOT:PSS based humidity sensor was highly improved ($1 s) by adding iron oxide nanoparticles, 4 keeping the humidity sensing range for linear response still limited to . A low power CMOS-based AZO/PEDOT:PSS sensor 19 has been used for humidity sensing (0-75% RH), but the resistance of the sensing layer is doubled within 40 days because of the change in the structure of PEDOT:PSS chains by the absorption of moisture and oxygen.…”
Section: Introductionmentioning
confidence: 99%
“…In an environment monitoring system, power consumption is one of the most critical and challenging design considerations in developing sensors as well as relevant interface/control circuits. To develop a low-power and low-cost environmental monitoring system, polymer composites are adopted for humidity and CO 2 sensing because of their high sensitivity, reasonable response time, low manufacturing cost, and low power consumption for operations [ 18 ]. Additionally, functional groups on polymer backbones can be adjusted by co-polymerization or structure derivations for different sensing targets [ 19 ].…”
Section: Introductionmentioning
confidence: 99%