2012
DOI: 10.1063/1.4770361
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A low-power, high-sensitivity micromachined optical magnetometer

Abstract: We demonstrate an optical magnetometer based on a microfabricated 87Rb vapor cell in a micromachined silicon sensor head. The alkali atom density in the vapor cell is increased by heating the cell with light brought to the sensor through an optical fiber, and absorbed by colored filters attached to the cell windows. A second fiber-optically coupled beam optically pumps and interrogates the atoms. The magnetometer operates on 140 mW of heating power and achieves a sensitivity below 20 fT/√Hz throughout most of … Show more

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Cited by 145 publications
(129 citation statements)
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“…Two distributed-feedback lasers (DFB) at a wavelength of 795 nm provide sufficient light to interrogate the atoms while eight diode lasers at 1.5 μm heat the vapor cells in all the sensor heads. To reach the desired atomic vapor density, the cells are heated to roughly 150 °C using absorptive filters attached to the windows of the cells similar to the method described previously [12]. Optical fiber splitters distribute the heating and probing lights from the lasers to the 25 sensors.…”
Section: Design Of the Imaging Arraymentioning
confidence: 99%
“…Two distributed-feedback lasers (DFB) at a wavelength of 795 nm provide sufficient light to interrogate the atoms while eight diode lasers at 1.5 μm heat the vapor cells in all the sensor heads. To reach the desired atomic vapor density, the cells are heated to roughly 150 °C using absorptive filters attached to the windows of the cells similar to the method described previously [12]. Optical fiber splitters distribute the heating and probing lights from the lasers to the 25 sensors.…”
Section: Design Of the Imaging Arraymentioning
confidence: 99%
“…The fabricated optical windows were smaller than 0.75 mm × 0.75 mm with a yield higher than 95%. Except for the wide applications in fabricating optical caps [80], anodic bonding was also used for building a vacuum tight vapor cell for optogalvanic spectroscopies [81], microlens arrays [82], 3D microlens scanners [83,84], microfluidic-based optical detection systems [85], micro-optical magnetometers [86], and micro-optical choppers for Raman spectroscopies [87]. Figure 8.…”
Section: Anodic Bondingmentioning
confidence: 99%
“…The use of coherent light sources has facilitated improvement in the sensitivity of laboratory devices to aT level [1], competitive with superconducting quantum interference device (SQUID) magnetometers [2]. Unlike SQUIDs, optically pumped magnetometers do not require cryogenic temperatures, making the technique well suited for the design of compact sensors [3].…”
Section: Introductionmentioning
confidence: 99%