A low-power high-flow shape memory alloy wire gas microvalve

Gradin, Henrik; Clausi, Donato; Braun, Stefan; Stemme, G.; Peirs, Jan; Wijngaart, Wouter van der; Reynaerts, Dominiek

doi:10.1088/0960-1317/22/7/075002

Cited by 9 publications

(9 citation statements)

References 19 publications

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“…Size effects on the thermomechanical response of SMAs have garnered an increasing attention due to the existing and potential uses of such materials in MEMS and other small scale devices. For instance, SMAs have been used to develop microgrippers [22], micropumps [23], microvalves [24][25][26], micromirrors [27], microswitches [28], microcages [29], among other applications [3,[30][31][32][33][34]. In order to enhance the applicability of SMAs at the small scale, the size effects on their thermomechanical behavior should be modeled to allow for accurate prediction of their response.…”

Section: Introductionmentioning

confidence: 99%

Modeling size effects on the transformation behavior of shape memory alloy micropillars

Hernandez

Lagoudas

2015

J. Micromech. Microeng.

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The size dependence of the thermomechanical response of shape memory alloys (SMAs) at the micro and nano-scales has gained increasing attention in the engineering community due to existing and potential uses of SMAs as solid-state actuators and components for energy dissipation in small scale devices. Particularly, their recent uses in microelectromechanical systems (MEMS) have made SMAs attractive options as active materials in small scale devices. One factor limiting further application, however, is the inability to effectively and efficiently model the observed size dependence of the SMA behavior for engineering applications. Therefore, in this work, a constitutive model for the size-dependent behavior of SMAs is proposed. Experimental observations are used to motivate the extension of an existing thermomechanical constitutive model for SMAs to account for the scale effects. It is proposed that such effects can be captured via characteristic length dependent material parameters in a power-law manner. The size dependence of the transformation behavior of NiFeGa micropillars is investigated in detail and used as model prediction cases. The constitutive model is implemented in a finite element framework and used to simulate and predict the response of SMA micropillars with different sizes. The results show a good agreement with experimental data. A parametric study performed using the calibrated model shows that the influence of micropillar aspect ratio and taper angle on the compression response is significantly smaller than that of the micropillar average diameter. It is concluded that the model is able to capture the size dependent transformation response of the SMA micropillars. In addition, the simplicity of the calibration and implementation of the proposed model make it practical for the design and numerical analysis of small scale SMA components that exhibit size dependent responses.

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Section: Introductionmentioning

confidence: 99%

Modeling size effects on the transformation behavior of shape memory alloy micropillars

Hernandez

Lagoudas

2015

J. Micromech. Microeng.

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“…Due to some special properties, many materials and creatures are used to actuate microvalves. Actuation mechanisms of phase change materials are discussed, including polymer (hydrogel [93][94][95][96], sol-gel [97]), paraffin [98][99][100][101][102][103], alloy (low melting point alloy [104][105][106] and shape memory alloy [107][108][109][110][111][112]). Compared with the traditional mechanically active microvalves, these phase change microvalves are relatively new and cheap.…”

Section: Materials and Biology Properties Actuationmentioning

confidence: 99%

“…For example, the hydrophilia of TiO 2 is utilized in the light actuated microvalves by irradiating ultraviolet (UV) [117][118][119]. The shape memory effect of shape memory alloy is an attractive actuation principle for the development of microvalves, since it allows simple and compact structures with high output forces, which are capable of controlling high pressure differences and flows [107][108][109][110][111][112]. Due to the high sensitivity of temperature, low melting point alloy phase changes with the change of temperature [104][105][106].…”

Section: Materials and Biology Properties Actuationmentioning

confidence: 99%

“…The valve could bore a pressure difference up to 200 kPa for gas (N 2 ) and up to 100 kPa for liquid (water), respectively [107,108]. Gradin et al investigated a SMA wire gas microvalve, which was suitable for high pressure high flow control [109]. Compared with the current high-flow valves in Table 7, the proposed design was good at the robust actuator performance, low power consumption and rapid response.…”

Section: Metal Phase Transition Actuation Low Melting Point Alloymentioning

confidence: 99%

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Actuation Mechanism of Microvalves: A Review

Qian

Hou

2020

Micromachines

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The microvalve is one of the most important components in microfluidics. With decades of development, the microvalve has been widely used in many industries such as life science, chemical engineering, chip, and so forth. This paper presents a comprehensive review of the progress made over the past years about microvalves based on different actuation mechanisms. According to driving sources, plenty of actuation mechanisms are developed and adopted in microvalves, including electricity, magnetism, gas, material and creature, surface acoustic wave, and so on. Although there are currently a variety of microvalves, problems such as leakage, low precision, poor reliability, high energy consumption, and high cost still exist. Problems deserving to be further addressed are suggested, aimed at materials, fabrication methods, controlling performances, flow characteristics, and applications.

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“…For these excellent characteristics, SMAs have attracted great attention in micromechanical systems. For instance, SMAs have been used to construct microgrippers (Lee et al, 1996), micropumps (Benard et al, 1998), microvalves (Gradin et al, 2012; Kohl et al, 2004; Megnin and Kohl, 2013), micromirrors (Fu et al, 2005), microswitches (Barth et al, 2010), microcages (Fu et al, 2008), and other applications (Abdullah et al, 2015; Fu et al, 2004; Wolf and Heuer, 1995; Zhao et al, 2014).…”

Section: Introductionmentioning

confidence: 99%

Nonlinear free vibration and damping analysis of a microbeam with pseudoelastic shape memory alloy layer based on the modified couple stress theory

Ashrafi

Ghaffari

Elahinia

et al. 2020

Journal of Vibration and Control

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The aim of this investigation is to evaluate the size effects on the nonlinear free vibration of the sandwich composite microbeam with an extensible shape memory alloy layer in the midplane. A one-dimensional constitutive model is considered to simulate the pseudoelastic behavior of the shape memory alloy layer. The governing equation of motion is derived using the Euler–Bernoulli beam theory together with the modified couple stress theory through the Hamilton’s principle. Midplane stretching and phase transformation of the shape memory alloy which are sources of nonlinearity were considered, and a numerical solution method is presented. A damped response of the sandwich composite microbeam is observed because of the hysteresis behavior of the extensible shape memory alloy layer in the midplane. Results are appraised by comparing with the available literature. The influence of material length scale, temperature, and initial velocity on the loss factor and other pivotal vibrational behavior is evaluated. Results show that increasing the material length scale to thickness ratio has a decreasing effect on damping capacity.

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A low-power high-flow shape memory alloy wire gas microvalve

Cited by 9 publications

References 19 publications

Modeling size effects on the transformation behavior of shape memory alloy micropillars

Modeling size effects on the transformation behavior of shape memory alloy micropillars

Actuation Mechanism of Microvalves: A Review

Nonlinear free vibration and damping analysis of a microbeam with pseudoelastic shape memory alloy layer based on the modified couple stress theory

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