A low-power gas sensor for environmental monitoring using a capacitive micromachined ultrasonic transducer

Mahmud, Marzana Mantasha; Li, J.; Lunsford, J. E.; Zhang, X.; Yamaner, F. Yalcın; Nagle, H. Troy; Oralkan, Ömer

doi:10.1109/icsens.2014.6985089

Cited by 20 publications

(11 citation statements)

References 4 publications

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“…For initial testing we used a 4.52 MHz device (Q=180) coated with a thin layer of polyisobutylene (PIB) and demonstrated an average sensitivity of 270 Hz/ppm within the range of 10–20 ppm of toluene concentration and a resolution of 12 ppb (Fig. 22)[33]. We have also implemented 6-, 8-, and 15-channel prototype arrays with a standard deviation of 1% in the parallel resonant frequency (4.5 MHz) in a 7×9 mm 2 die area.…”

Section: Resultsmentioning

confidence: 99%

Low-Power Wearable Systems for Continuous Monitoring of Environment and Health for Chronic Respiratory Disease

Dieffenderfer

Goodell

Mills

et al. 2016

IEEE J. Biomed. Health Inform.

171

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We present our efforts towards enabling a wearable sensor system that allows for the correlation of individual environmental exposures to physiologic and subsequent adverse health responses. This system will permit a better understanding of the impact of increased ozone levels and other pollutants on chronic asthma conditions. We discuss the inefficiency of existing commercial off-the-shelf components to achieve continuous monitoring and our system-level and nano-enabled efforts towards improving the wearability and power consumption. Our system consists of a wristband, a chest patch, and a handheld spirometer. We describe our preliminary efforts to achieve a sub-milliwatt system ultimately powered by the energy harvested from thermal radiation and motion of the body with the primary contributions being an ultra-low power ozone sensor, an volatile organic compounds sensor, spirometer, and the integration of these and other sensors in a multimodal sensing platform. The measured environmental parameters include ambient ozone concentration, temperature, and relative humidity. Our array of sensors also assesses heart rate via photoplethysmography and electrocardiography, respiratory rate via photoplethysmography, skin impedance, three-axis acceleration, wheezing via a microphone, and expiratory airflow. The sensors on the wristband, chest patch, and spirometer consume 0.83, 0.96, and 0.01 milliwatts respectively. The data from each sensor is continually streamed to a peripheral data aggregation device and is subsequently transferred to a dedicated server for cloud storage. Future work includes reducing the power consumption of the system-on-chip including radio to reduce the entirety of each described system in the sub-milliwatt range.

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Section: Resultsmentioning

confidence: 99%

Low-Power Wearable Systems for Continuous Monitoring of Environment and Health for Chronic Respiratory Disease

Dieffenderfer

Goodell

Mills

et al. 2016

IEEE J. Biomed. Health Inform.

171

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“…Seok et al have observed fully reversible ethanol detection for 50 min, exposing the device to nine different concentrations [ 133 ]. Other sensors have only been demonstrated for single minutes ranges [ 102 , 127 ]. Research on these aspects is relatively scarce and focus is typically applied to primary concerns, such as demonstration of working principles, and signal processing.…”

Section: Discussionmentioning

confidence: 99%

“…It is commonly understood that mass-loading of the resonant sensing structure, the resonant frequency will shift [ 94 , 95 , 96 , 97 ], and in most cases, developers tend to prove the linear relationship between the shift of the resonant frequency to the quantity of molecules of interest. This is understandable since SUGS operation can be maintained then by tracing the frequency of the free-running oscillator [ 102 ]. However, there can be several different interactions between the gas molecules and the functional layer.…”

Section: Functional Materialsmentioning

confidence: 99%

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review

Barauskas

Dzikaras

Bieliauskas

et al. 2020

Sensors

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This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.

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“…The cavities and bottom electrodes are formed on a borosilicate glass wafer [see Fig. 17(a) and (b)] [40]. The device layer of an SOI wafer bonded on glass forms the vibrating plate on top of vacuum-sealed cavities.…”

Section: E Capacitive Micromachined Ultrasonic Transducers For Volatmentioning

confidence: 99%

Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing

et al. 2015

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| This article provides the latest advances from the NSF Advanced Self-powered Systems of Integrated sensors and Technologies (ASSIST) center. The work in the center addresses the key challenges in wearable health and environmental systems by exploring technologies that enable ultra-long battery lifetime, user comfort and wearability, robust medically validated sensor data with value added from multimodal sensing, and access to open architecture data streams. The vison of the ASSIST center is to use nanotechnology to build miniature, selfpowered, wearable, and wireless sensing devices that can enable monitoring of personal health and personal environmental exposure and enable correlation of multimodal sensors. These devices can empower patients and doctors to transition from managing illness to managing wellness and create a paradigm shift in improving healthcare outcomes. This article presents the latest advances in high-efficiency nanostructured energy harvesters and storage capacitors, new sensing modalities that consume less power, low power computation, and communication strategies, and novel flexible materials that provide form, function, and comfort. These technologies span a spatial scale ranging from underlying materials at the nanoscale to body worn structures, and the challenge is to integrate them into a unified device designed to revolutionize wearable health applications.

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A low-power gas sensor for environmental monitoring using a capacitive micromachined ultrasonic transducer

Cited by 20 publications

References 4 publications

Low-Power Wearable Systems for Continuous Monitoring of Environment and Health for Chronic Respiratory Disease

Low-Power Wearable Systems for Continuous Monitoring of Environment and Health for Chronic Respiratory Disease

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review

Flexible Technologies for Self-Powered Wearable Health and Environmental Sensing

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