A Low-G Omnidirectional Mems Inertial Switch with Load Direction Identification

Du, Liqun; Yu, Yang; Yuan, Bowen; Guo, Bingjiang; Wang, Chao; Du, Chengquan; Liu, Junshan

doi:10.2139/ssrn.3959794

Cited by 1 publication

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“…The structural sketch of the proposed inertial switch is shown in Figure 4 . The threshold acceleration of the switch dropped to 38 g. Moreover, they improved the design, redesigning the structure of the central springs [ 55 ]. The switch adopted an S-type flexible connection that could reduce the stiffness of the electrode to extend the contact time of the switch.…”

Section: Intermittent Inertial Switchesmentioning

confidence: 99%

Research Progress of MEMS Inertial Switches

Liu

Niu

et al. 2022

Micromachines

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As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.

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Section: Intermittent Inertial Switchesmentioning

confidence: 99%