A low frequency operation high speed stick-slip piezoelectric actuator achieved by using a L-shape flexure hinge

Abstract

Motion speed is an important parameter of stick-slip piezoelectric actuators. However, most of the existing stick-slip piezoelectric actuators achieve a high motion speed by operating under a quite high driving frequency. Operation under high frequency will affect the motion stability and as well accelerate the wear of the contact surfaces. To realize relatively high speed under a relatively low operation frequency, here a specific L-shape flexure hinge was employed to design the stick-slip piezoelectric actuator. Its structure design, working principle and processes, structure parameter selection, and output performances were studied in detail. The experimental results indicated that the designed actuator could achieve a maximum motion speed of 16.67 mm s −1 under the driving frequency of 800 Hz. This operation frequency was much lower than those employed in previous actuators for achieving a similar motion speed. By comparative analysis, it was shown that the designed actuator also maintained good minimum stepping displacement and loading capacity. These features would be useful for the practical applications of stick-slip piezoelectric actuators.

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

“…From the previously published articles, the FHMs-PSSAs designed by a single piezoelectric stack only showed the output performance in either forward or reverse direction in most cases (Cheng et al, 2017a;Gao et al, 2019aGao et al, , 2019bHuang and Sun, 2019;Li et al, 2015cLi et al, , 2020aLi et al, , 2020bLi et al, , 2020cLu et al, 2020b;Wan et al, 2020;Zhang et al, 2019aZhang et al, , 2020. To improve the consistency of FHMs-PSSAs forward and reverse performance, some FHMs-PSSAs adopted the structural design that two asymmetric stators were directly connected in parallel type (Huang et al, 2020;Li et al, 2017aLi et al, , 2018aWang et al, 2019a;Yang et al, 2020b) or in series type (Huang et al, 2012) on the mechanical mechanism; however, due to the normal pressure between the two driving feet and the slider, the other stationary driving foot adversely affected the driving performance as one driving foot was driving. To avoid the above interference phenomenon, although the two driving units were in series (Wang et al, 2019b(Wang et al, , 2020b or parallel (Chu et al, 2016;Liu et al, 2012;Lu et al, 2020a;Wang et al, 2011;Yao et al, 2019;Zhang et al, 2019c) structures, they shared one driving foot by decoupling design, as shown in Figure 10(a) and (b).…”

“…Figure 2. The excitation electrical signal for PSSAs: (a) the sawtooth waveform(Bansevicius and Blechertas, 2008;Chang and Li, 1999;Chu and Fan, 2006;Fan et al, 2019;Gao et al, 2019aGao et al, , 2019bHiguchi et al, 1990;Huang and Sun, 2019;Huang et al, 2011Huang et al, , 2012Huang et al, , 2016Huang et al, , 2020Hunstig, 2017;Kurosawa and Ueha, 1991;Lee et al, 2007;Li et al, 2015aLi et al, , 2017aLi et al, , 2018bLi et al, , 2019cLi et al, , 2020cLiu et al, 2012Liu et al, , 2019aLyding et al, 1988;Mashimo, 2014;Oubellil et al, 2019;Pan et al, 2016Pan et al, , 2019Pohl, 1987a;Qin et al, 2019b;Salim et al, 2018;Shao et al, 2019aShao et al, , 2019bSmith et al, 1996;Song et al, 2018;Tang et al, 2020;Tomikawa et al, 1989;Wang and Lu, 2012;Wang et al, 2011Wang et al, , 2017cWang et al, , 2019dWen et al, 2013;Xu et al, 2020;…”

Design, analysis, and experimental study on a novel inertial piezoelectric actuator with double-stator cooperative motion

“…Precision actuator is a crucial technology widely applied in high-end areas such as biology (Huang et al, 2020; Wang et al, 2010; Zhang et al, 2009), medicine (Fisher et al, 2006), mechanical engineering (Choi and Lee, 2005; Li et al, 2018; Wang et al, 2017), robot (Wang et al, 2021a), and aerospace industry (Wang et al, 2019), in recent years. Since the size of manipulated objects varies from a few microns to centimeters, the precision transmission mechanism needs a larger working stroke and higher resolution (Li et al, 2018; Wang et al, 2017).…”

A stick-slip actuator for suppressing the backward motion by introducing a flexible beam

“…Yu et al (2020) presented a multi-incentive driving method, assisting the actuator to achieve the velocity of 70.26 mm/s for 33 100 Hz. Lastly, Huang et al (2020) designed an L-shaped actuator capable of achieving a velocity of 16.67 mm/s for the driving frequency of 800 Hz.…”