A low-frequency micromechanical resonant vibration sensor for wear monitoring

Fritsch, Holger; Lücklum, Ralf; Iwert, Thomas; Hauptmann, P.; Scholz, D.; Peiner, Erwin; Schlachetzki, A.

doi:10.1016/s0924-4247(97)01609-9

Cited by 28 publications

(14 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Systems for engine emission and combustion control, based on microsensors, are also being developed. [12][13][14][15][16][17] They combine physical and chemical sensors that measure the state of the engine; for example, pressure in the cylinder, oxygen content in the exhaust gases, and engine rotation speed. These data are processed and used to regulate spark ignition and fuel injection, to optimize the performance of the engine in terms of fuel consumption and pollution.…”

Section: Automotive Sensorsmentioning

confidence: 99%

“…The incremental conversion algorithm is described by (16) where U and Q denote the output signals of the integrator and the comparator, respectively, and k denotes the current clock period. The N bit digital output signal obtained after 2 N clock periods is therefore given by (17) Second-order ΣΔ modulators are much less sensitive to limit cycles than their first-order counterparts because the quantization noise is a more complex function of the design parameters.…”

Section: A/d Convertermentioning

confidence: 99%

See 1 more Smart Citation

17 Interface Circuitry and Microsystems

Malcovati

Maloberti

2006

MEMS: A Practical Guide to Design, Analysis, and Applications

View full text Add to dashboard Cite

Section: Automotive Sensorsmentioning

confidence: 99%

Section: A/d Convertermentioning

confidence: 99%

17 Interface Circuitry and Microsystems

Malcovati

Maloberti

2006

MEMS: A Practical Guide to Design, Analysis, and Applications

View full text Add to dashboard Cite

“…There are many methods which could be used to measure vibration, for example by measuring the capacitance, change of electrical charge of a piezoelectric material [2,3,4], change of position in a Linear Variable Displacement Transformer (LVDT) [1], using optical-fiber cantilever [5], using magnetic sensor [6] or using elastomagnetic composite [7]. In this paper, we would like to show a low frequency two dimension vibration sensor using flat coil element.…”

Section: Introductionmentioning

confidence: 99%

The low frequency 2D vibration sensor based on flat coil element

Djamal¹,

Sanjaya²,

Islahudin³

et al. 2012

AIP Conference Proceedings

View full text Add to dashboard Cite

Vibration like an earthquake is a phenomenon of physics. The characteristics of these vibrations can be used as an early warning system so as to reduce the loss or damage caused by earthquakes. In this paper, we introduced a new type of low frequency 2D vibration sensor based on flat coil element that we have developed. Its working principle is based on position change of a seismic mass that put in front of a flat coil element. The flat coil is a part of a LC oscillator; therefore, the change of seismic mass position will change its resonance frequency. The results of measurements of low frequency vibration sensor in the direction of the x axis and y axis gives the frequency range between 0.2 to 1.0 Hz.

show abstract

“…This micro-electromechanical resonant air transducer has different mechanical resonant frequency depending on the size of the membrane. Using the resonant frequency of MEMS has generated a great deal of interest in various industrial applications as they can be used as pressure sensors [3] and vibration sensors [4].…”

Section: Introductionmentioning

confidence: 99%

Micromachined Piezoelectric Polymer Membrane Acoustic Sensor

Lam

Chan

2005

Integrated Ferroelectrics

View full text Add to dashboard Cite

This paper reports on a 2.3 mm × 2.3 mm polymer micro-electromechanical systems (MEMS) for air transducer applications. The MEMS, used as a receiver of ultrasonic signal, has a suspended membrane structure. A 2.7 µm thick poly(vinylidene fluoridetrifluoroethylene) [P(VDF-TrFE)] 70/30 mol% copolymer was spun on a silicon dioxide/silicon substrate and then poled in-situ. The Si substrate was then etched from the backside by anisotropic chemical etching in KOH to produce a P(VDF-TrFE)/SiO 2 /Si suspended membrane structure. The displacement of the membrane was measured by means of a laser vibrometer. The maximum deflection at the center of the membrane was 0.9 µm at 40.8 kHz under an input drive of 7 V. A commercial air transducer was used as the transmitter to emit ultrasound at 40.8 kHz. The MEMS acoustic transducer, which has similar resonance frequency, was used as the receiver. The temporal response of the MEMS and its sensitivity were measured. The result suggested that the MEMS has potential for monitoring ultrasound emission.

show abstract

A low-frequency micromechanical resonant vibration sensor for wear monitoring

Cited by 28 publications

References 3 publications

17 Interface Circuitry and Microsystems

17 Interface Circuitry and Microsystems

The low frequency 2D vibration sensor based on flat coil element

Micromachined Piezoelectric Polymer Membrane Acoustic Sensor

Contact Info

Product

Resources

About