A Low-Frequency MEMS Magnetoelectric Antenna Based on Mechanical Resonance

Abstract

Antenna miniaturization technology has been a challenging problem in the field of antenna design. The demand for antenna miniaturization is even stronger because of the larger size of the antenna in the low-frequency band. In this paper, we consider MEMS magnetoelectric antennas based on mechanical resonance, which sense the magnetic fields of electromagnetic waves through the magnetoelectric (ME) effect at their mechanical resonance frequencies, giving a voltage output. A 70 μm diameter cantilever disk with SiO2/Cr/Au/AlN/Cr/Au/FeGaB stacked layers is prepared on a 300 μm silicon wafer using the five-masks micromachining process. The MEMS magnetoelectric antenna showed a giant ME coefficient is 2.928 kV/cm/Oe in mechanical resonance at 224.1 kHz. In addition, we demonstrate the ability of this MEMS magnetoelectric antenna to receive low-frequency signals. This MEMS magnetoelectric antenna can provide new ideas for miniaturization of low-frequency wireless communication systems. Meanwhile, it has the potential to detect weak electromagnetic field signals.

Wireless magnetoelectrically powered organic light-emitting diodes

“…For example, electrical neuronal stimulation has been demonstrated using ME nanoparticles ( 18 ) and laminate structures ( 19 ). Furthermore, ME transducers can serve as sensors ( 20 , 21 ), antennae ( 22 , 23 ), and energy harvesters ( 24 ). Singer et al ( 19 ) recently showed that it is possible to wirelessly power an inorganic LED soldered to the surface electrodes of a simple bilayer ME transducer.…”

Miniaturized Low-Frequency Communication System Based on the Magnetoelectric Effect

“…This approach enables the utilization of near-field energy, which is challenging to harness in conventional electrical antennas, in antenna radiation and facilitates the miniaturization of low-frequency communication devices without requiring extensive impedance matching networks [15]. Mechanical antennas can be categorized into four types: electret type [16,17], permanent magnet type [18], piezoelectric type [19], and magnetoelectric type [20][21][22]. Among these, magnetoelectric mechanical antennas have gained popularity in recent years due to their low power consumption, light weight, and rapid response.…”

Modeling the Converse Magnetoelectric Effect in the Low-Frequency Range

“…In recent years, research interest in the CME effect in the low-frequency region has increased. This is due to the great interest in the design of magnetic field sensors [ 16 , 17 , 18 ] and low-frequency ME antennas [ 19 , 20 , 21 , 22 ] and the possibility of their use in spintronics [ 23 , 24 , 25 , 26 , 27 , 28 ] and ME memory devices [ 29 , 30 , 31 ]. The purpose of this article is a brief analysis of the works on the CME effect and to obtain expressions for CME coefficients for the low-frequency region, including the electromechanical resonance (EMR) modes: longitudinal, bending, longitudinal-shear, and torsional.…”

“…The obtained high characteristics are of great interest for biomagnetic applications. Recently, research into ME transmitting antennas based on the CME effect in the low-frequency range has been very active [ 19 , 20 , 21 ] since their creation will significantly reduce the size and ensure effective underwater and underground communications. Yao et al [ 19 ] proposed a bulk acoustic wave-mediated multiferroic antenna structure.…”

“…Dong et al [ 20 ] presented a novel, very low-frequency communication system using one pair of ME antennas. With 80 V driving voltage, the power consumption of the ME transmitter has been measured as 400 mW at the maximum communication distance of 120 m. In [ 21 ], Y. Wang et al investigated a ME antenna based on mechanical resonance made by MEMS technology. The ME resonant disk structure with a diameter of 70 μm and a thickness of 1 μm with SiO 2 /Cr/Au/AlN/Cr/Au/FeGaB-stacked layers was prepared on a 300 μm silicon wafer and showed a giant ME coefficient of 2.928 kV/cm/Oe in resonance at 224.1 kHz.…”